Used LAM RESEARCH Kiyo EXP #9311228 for sale

LAM RESEARCH Kiyo EXP is an etcher/asher used specifically for semiconductor processing. It is a single-wafer etching/ashing system designed to provide precise control of process gases and rapid throughput for complex, ultra-small process geometries. Kiyo EXP is capable of high throughput, with a maximum capacity of 150 wafers per hour. Its advanced design minimizes airflow turbulence and chemical residue, enabling repeatable process yields. LAM RESEARCH Kiyo EXP has a patented low-flow Reactively Enhanced Etching (REE) process that can attain etching speed on the order of 200 nm/min. It provides higher selectivity than traditional etching techniques, minimizes Redeposition, enables deposit removal without over etching, and improves yield. Kiyo EXP is compatible with organic and inorganic etching processes, including deep-RIE (Reactive Ion Etching), dry etching, and wet etching. Its high etch rates and selectivities make it ideal for etching SiO2, SiNx, and SiOC. It is also capable of high-aspect ratio etching and anisotropic patterning for memory and logic device applications. LAM RESEARCH Kiyo EXP features a chemical operating range of 12 inches of mercury (mm/Hg) to 1000 mm/Hg and a temperature range from -25°C to +400.°C. It has an optional on-board mass flow controller (MFC) for precise control of gases, and an inert gas control system for operating gas chemistry at temperatures above 400°C. Kiyo EXP also has a high power RF generator that can provide up to 2000 Watts of power for etching processes. LAM RESEARCH Kiyo EXP is a reliable and precise single-wafer etcher/asher ideal for semiconductor manufacturing processes requiring precise etching, high throughput, and a range of temperatures and chemical atmospheres. Its patented REE process affords higher selectivity than traditional etching techniques, which helps improve device yield and up process repeatability.