Used LAM RESEARCH KIYO FX #293819375 for sale

LAM RESEARCH KIYO FX is a high-performance, high-capacity etcher/asher solution developed to meet semiconductor fabrication requirements around the world. This etching and ashing equipment has been engineered to deliver industry-leading performance for a wide variety of etching and etching/ashing processes used throughout the semiconductor industry. KIYO FX provides low-stress etching/ashing of multiple layers of different digital materials, enabling improved yield and quality. The system utilizes a digital controller to maintain uniformities in the etching/ashing process over time and provide consistency from batch to batch. LAM RESEARCH KIYO FX comes equipped with an advanced dry Etch/Asher module, designed to deliver increased throughput and improved throughput uniformity for both etching and ashing processes. The etching/ashing process is tailored to match the specific layers and materials being etched or ashed. The unit is capable of delivering etch rates of up to 95% in semiconductor applications and ashing rates of up to 60%. In addition to its powerful etching/ashing module, KIYO FX also features a number of other features that help improve performance and efficiency during the etching and ashing process. LAM RESEARCH KIYO FX includes a highly precise ultra-high-frequency gyroscope and quill drive, providing precise movement of the platen during etching and ashing. This increased accuracy and control greatly improves process uniformity and helps to ensure that each layer is etched and ashed consistently. KIYO FX also includes a customized measurement tool that can help to determine the most suitable etching/ashing parameters for a given process before the machine starts running. This is done by measuring the etching and ashing uniformities before and after etching and ashing, providing data for accuracy validation and process optimization. LAM RESEARCH KIYO FX is designed for both manual and automated processes, and offers a number of options for operation. The tool has the capability to be automated, with a full range of customizable parametric recipes that can be set and stored by the user. In addition, the asset also features an integrated data collection and reporting process that enables the full assessment of process results. KIYO FX is an etching and ashing model that offers exceptional throughput rate and uniformity, enabling improved yields and process optimization. Utilizing a digital controller, advanced etching/ashing module, precise movements of platen, and data collection and reporting, LAM RESEARCH KIYO FX provides an ideal solution for the etcher/asher of fabricators working with multiple layers of digital materials.