Used LAM RESEARCH KIYO FX #9311231 for sale

LAM RESEARCH KIYO FX Plasma Etcher / Asher is an integrated plasma etching and post-processing system designed to provide efficient and uniform plasma etching and post-processing of a variety of surfaces including metals, semiconductors, silicides, dielectrics, and optically coated materials. KIYO FX is equipped with a high-power RF generator to provide for a higher selectivity and better surface treatment than most other etchers on the market. LAM RESEARCH KIYO FX has a large chamber size of 600 x 545 x 280 mm, allowing for a large range of applications, allowing for the etching of larger stacks or collecting arrays. The controller provides an intuitive GUI with an extensive range of parameters that allows for fine tuning of the etch process. The plasma etchers are designed for an optimal etch profile and minimum damage for the wafers. KIYO FX is able to etch wafers with controlled plasma parameters to match the resist specifications, material combination, and process parameters. It also includes a dual chuck design that applies pressure over the backside of the wafer to ensure a better etch profile. LAM RESEARCH KIYO FX can etch at various gas flows such as Ar, O2, N2 and C4F8, and has optimized recipes for each etching material part. KIYO FX comes with a complete discussion covering etch process, etch parameters, wafer contamination, wafer loading and unloading, wafer measurement and feedback, chamber maintenance, and diagnosis. All of these features make LAM RESEARCH KIYO FX one of the more comprehensive etching systems available on the market. It is also very user friendly and can be tailored to the customer's specific needs. KIYO FX is a versatile platform that is well-suited for many etching applications in the semiconductor industry. The robust design allows for a wide range of commodities to be etched in a single run including metals, dielectrics, insulation materials, and Passivation layers. This etching system also features efficient temperature control, low chamber pressure, and low deposition interface, enabling the etcher to etch with superior controllability and quality. LAM RESEARCH KIYO FX etcher also provides for a high data rate, allowing for the etching of large parts. Overall, KIYO FX is a great Etcher / Asher for etching and post-processing of a wide variety of surfaces. The robust design, intuitive user interface, and adjustable parameter settings make this an excellent choice for etching applications in the semiconductor industry.