Used LAM RESEARCH Kiyo #9298588 for sale
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LAM RESEARCH Kiyo is an etcher / asher designed to provide superior etching and ashing capability in a wide variety of high-volume applications. Using state-of-the-art technology, it is an excellent choice for the most demanding high-volume production requirements. Kiyo utilizes an Advanced Source-Monitor Polarity (ASMP) technology as well as a unique Multi-Point Arc-Assisted Etch (MPAE) to provide superior etching and ashing performance. ASMP provides LAM RESEARCH Kiyo with the ability to use the same etching tool at different combinations of bias voltages and source currents, allowing for intricate design changes without the need for new etching tools. The MPAE is a unique process of electrical arcs initiated between the substrate electrode and the etching tool which helps to transfer gas molecules to the source-monitor with higher accuracy and reliability. This feature provides additional process repeatability and efficiency. Kiyo also has an integrated, temperature controlled chamber which ensures optimal temperature stability while etching and ashing. This ensures high-quality etching and ashing and helps reduce the chances for substrate damages during the process. LAM RESEARCH Kiyo can etch and/or ashering wafers up to 8" in diameter and wafer thicknesses up to 200 microns. It is capable of high-density etching, single-level etching, multi-level etching, and sub-micron etching. Kiyo is a full-featured tool that presents several advantages over more traditional options. Its advanced source-monitor polarity technology and multilayer etching structure target the most needed process capability, decreasing the need for multiple-tool setups and enabling higher throughputs. Its precision etching enables extremely high yields, and its compact shape and small footprint make it a convenient fit for small rework stations or labs. In conclusion, LAM RESEARCH Kiyo is an etcher / asher that packs a punch in terms of features and is ideal for a variety of high-volume applications. It provides high-precision etching, superior etch and ash performance, temperature stability, and a flexible design structure. Kiyo promises to be a dependable and efficient tool for any laboratory.
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