Used LAM RESEARCH LF 4500 #9245075 for sale

LAM RESEARCH LF 4500 is an advanced etching/ashing tool used for reactive ion etching (RIE) and ashing operations. This etcher/asher offers superior performance with advanced process flexibility for a wide range of RIE and ashing applications. LF 4500 features a robust design including a high speed plasma chamber with a large loadlock, and fast, precise recipe software. This etcher/asher is equipped with a multizone end-point detector, which allows rapid chamber cleaning and more efficient processes. LAM RESEARCH LF 4500 is capable of performing both etching and ashing processes in one tool. Etching operations with LF 4500 are carried out using an SF6 and O2 gas mixture. Etch rates are adjustable depending on the type of process and substrate being used. LAM RESEARCH LF 4500 is capable of delivering high-precision etching with little variability. LF 4500 also offers a range of ashing processes, including rapid ashing and high-precision stainless steel asher options. This etcher/asher uses a hot-tub of fluoro-organics vapor to achieve chemical ashing. This method offers excellent control of chamber cleanliness and consistent process results. LAM RESEARCH LF 4500 has a fully integrated and easy to use recipe software system. This software allows users to rapidly program recipes for both etching and ashing operations, making it easy to achieve desired process results. The system also includes advanced process control features for greater control over etching and ashing. Overall, LF 4500 is a reliable and advanced etching and ashing system. It offers powerful process flexibility, precise etch rates, and rapid etching and ashing operations. With the high-performance capabilities of LAM RESEARCH LF 4500 and its easy to use recipe software, users are able to quickly and reliably achieve superior results for a variety of trimming, metallization, and mosfet/mask openings processing applications.