Used LAM RESEARCH Metal45 #9351454 for sale

LAM RESEARCH Metal45 is a CVD etcher / asher designed for high throughput processing of semiconductor wafers. Metal45 offers state-of-the-art process flexibility and is capable of seamless integration into a production environment. LAM RESEARCH Metal45 features include conformal plasma uniformity, superior loading and unloading capabilities, and optimized process control. These capabilities make it an ideal etcher / asher for etching and ashing a wide range of materials such as Cu, Al, TiN, and more demanding metals and organics. Metal45 supports both standard backside etching and sidewall etching applications. It utilizes a pair of independently operated off-axis high-density plasma sources to ensure highly uniform etch and ash rates. LAM RESEARCH Metal45 also utilizes a proprietary 3SICARD™ equipment to control and set process parameters, which helps ensure consistently high quality results. Metal45 is an automated system with a compact footprint. It is designed for easy integration into a production line and provides an intuitive software interface for etching and ash process setup and monitoring. The automated unit is fully configurable to optimize the process of the individual substrate's requirements. LAM RESEARCH Metal45 is also equipped with a unique over-etch and re-etch capability, allowing for fine-tuning of process parameters during the etching and ash operations. Metal45 machine is designed to inform operators in real-time via the tool's graphical operator panel, making it easy to monitor process performance. LAM RESEARCH Metal45's state-of-the-art design also provides high reliability and process repeatability, making it an ideal etcher / asher for large scale production. Additionally, Metal45 is certified and compliant with SEMI S2-0200 and the Common Industry Standard (CIS) for High Volume Batch Etch systems. In conclusion, LAM RESEARCH Metal45 is a robust high throughput etcher / asher that is designed for reliable, repeatable, and accurate processing of a wide range of material types. The asset's advanced features make it ideal for the large scale production environment.