Used LAM RESEARCH / NOVELLUS (Etchers / Ashers) for sale
Lam Research and Novellus (now manufacturers to Lam Research) are industry-leading manufacturers of etching and ashing tools for the semiconductor industry. These tools are used in the fabrication processes to create intricate patterns and structures on silicon wafers. Lam Research offers a range of etchers and ashers with cutting-edge technology and advanced features. Their flagship products include the Vector Express, Vector Extreme, and Vector systems. These etchers/ashers provide high throughput, superior process control, and enhanced flexibility for leading-edge chip manufacturing. They are designed to meet the increasing demands of advanced nodes and deliver exceptional process uniformity and repeatability. One of the significant advantages of Lam Research / Novellus etchers/ashers is their ability to handle a wide variety of substrates and offer excellent process versatility. These systems support multiple applications, including dielectric etch, metal etch, and plasma clean processes. The Vector Express machine is designed for high-volume manufacturing and offers industry-leading productivity. Its advanced chamber design enables high etch rate and superior film thickness uniformity. The Vector Extreme is built to enable challenging device manufacturing with advanced process control and enhanced particle and contamination control. Overall, Lam Research / Novellus etchers/ashers are well-regarded for their reliability, productivity, and process control capabilities. They have become the go-to choice for leading semiconductor manufacturers worldwide.
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