Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #293595649 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex is an etcher/asher designed to provide users with the utmost flexibility when it comes to etching and etching processes. This equipment is designed to handle a wide range of applications, from general purpose etching to high-precision microfabrication. Its combination of versatility and reliability make it a great choice for many etching and ashing needs. ONTRAK 2300 Exelan Flex is composed of an integrated controller, electrical assembly, wafer carousel, showerhead, and sidewall assemblies. The robust controller powers the system through user-friendly graphical displays and intuitive control panels that offer simple operation, parameter input, and status displays. The electrical assembly, which includes relays and contactors, ensures proper power and process levels during operation. The wafer carousel securely holds wafers for movement in and out of the process chamber, and is constructed with a polished stainless-steel interior for optimal cleanliness and durability. The showerhead and sidewall assemblies offer a number of customizable processes, such as reactive ion etching (RIE), inductively coupled plasma etching (ICP), ashing, and stripping. The showerhead is designed to provide uniform etching of the entire wafer, while the sidewall assemblies allow for selective etching and can be used to reduce etching time by optimizing wafer position in the process chamber. The unit achieves excellent and repeatable etching results through its advanced recipe creation, which allows for process monitoring and adjustments. Recipe performance can be evaluated and further optimized by analyzing various parameters-including wafer position and pressure, chamber temperature and pressure, gas flow rate, and process time-on any recipe/batch. The machine also features comprehensive safety features such as overpressure, overvoltage, and temperature-monitoring systems. LAM RESEARCH 2300 Exelan Flex is designed and manufactured to the highest quality standards and specifications, making it an ideal solution for many etching and ashing-related needs. Its combination of comprehensive hardware and software features, reliability, and flexibility make it an excellent choice for many different types of etching and ashing applications.