Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #293595651 for sale
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ID: 293595651
Wafer Size: 8"
Vintage: 2004
Dielectric etcher, 8"
Gasbox
BROOKS / PRI AUTOMATION ATM/VTM Robot
2004 vintage.
LAM RESEARCH / ONTRAK 2300 Exelan Flex is a powerful and versatile etcher/asher designed for a wide variety of microfabrication applications. Its ability to process a variety of substrate materials, such as silicon, gallium arsenide, quartz, ceramics, and other compound materials, makes it a reliable and cost-effective tool for researchers, engineers, and production personnel. ONTRAK 2300 Exelan Flex is designed to offer maximum process flexibility in a single equipment. It accurately controls the etching/ashing process with a tandem chamber design featuring combined thermal, plasma, and UV sources. The versatile dual-chamber system can be used for etching, ashing, and passivation processes, with both chambers individually adjustable to accommodate various substrates. The unit is also equipped with a built-in dynamic wafer handling unit for efficient loading and unloading of the substrate and for improved simultaneous process control. LAM RESEARCH 2300 Exelan Flex also offers sophisticated controls and safety features that make it especially user-friendly and safe to operate. This unit utilizes a comprehensive process monitoring machine and PID control, featuring a high-speed data acquisition tool to optimize process reliability. The enhanced safety device helps reduce the risk of equipment damage and personnel injury, making it an excellent choice for delicate microfabrication and medical device applications. 2300 Exelan Flex also features easy-to-use setup, control, and monitoring capabilities. The control unit allows for non-volatile recipe storage as well as one-touch operation for repeatable processes. The asset also comes with an integrated computer interface for remote operation and monitoring. Thanks to its streamlined design, LAM RESEARCH / ONTRAK 2300 Exelan Flex is an efficient and cost-effective etcher/asher for any microfabrication application, from medical device production to production of advanced electronic components.
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