Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #78823 for sale
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ID: 78823
Wafer Size: 12"
Vintage: 2007
Etcher, 12"
Specifications:
Mainframe: 2300 ver 2.0 (4VPM)
(Qty 3) FOUP Loaders
(Qty 3) Hermos carrier ID
Light curtain for OHT
Status lamp (RYGB)
25-Slot input buffer station
Cable: TM-Subpanel, 100ft
TMLocal NSR: system backup software
(3) 2300 Exelan Flex CFE etch chambers:
PM1: 2007 vintage
PM2: 2007 vintage
PM3: 2007 vintage
Common Items (Qty 1 per chamber):
1600 L/S Edwards Turbo Pump
PMNSR6215: Dual Chiller Install Kit
PMNSR6496-1A (SEMI F47)
2300 Exelan FLEX Quick Clean Kit
2300 Exelan FLEX Pendulum Valve Kit
2300 Exelan FLEX Service Tool Kit
Gas Box: 16 Line Gas Box (IGS)
Software: 2nd HSMS (Fab comm.) Support
Qty 2: ESC, ASSY, DZ CLG, 2 FNSH, 12"
Electrical: 208VAC, 3 Phase, 50/60Hz
CE marked
2007 vintage.
LAM RESEARCH / ONTRAK 2300 Exelan Flex is an etch-and-ash semiconductor processing equipment. It is commonly used in lithography and patterning, as well as etching, resist stripping, and ashing. This system is a high end model, providing uniform and accurate processing results over a wide range of temperatures, pressures, and times. The Exelan Flex is designed for a variety of applications, including wafer etch, dielectric and ferromagnetic patterning, and plasma etching. It is run with a universal microwaves (UWM) generator and offers a variety of process capabilities and processes. This enables users to create precise patterns on the wafer with a high degree of accuracy. The Exelan Flex is also effective for resist stripping and ashing, as well as for other chemical processing. The Exelan Flex provides high repeatability and accuracy, thanks to its precise temperature and pressure controls. It includes a computer-based graphical user interface, allowing users to create and monitor the process parameters. The unit also features a variety of advanced features, such as auto-repeat programming, real time graphics, and batch processing. This machine also features chemical management features and support for pre-programmed recipes. The Exelan Flex is a very reliable tool, offering excellent throughput and overall performance. It also offers an easy-to-use user interface with a robust data management asset. This model also includes accessories such as an exhaust equipment and system upgrade kits, helping users keep the unit up to date. Finally, this etch-and-ash machine has been designed for optimal safety, featuring built-in safety features designed to prevent accidents. This tool is highly reliable and efficient, helping users create accurate patterns, etch, and ash with ease. ONTRAK 2300 Exelan Flex is an excellent choice for a wide range of lithographic and patterning applications.
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