Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9032660 for sale

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ID: 9032660
Wafer Size: 8"
Vintage: 2007
Etcher, 8" (3) Chambers, (4) Gas Boxes PDU Software version: 1.7.3-SP3-HF2a 2007 vintage.
LAM RESEARCH / ONTRAK 2300 Exelan Flex is designed for high-throughput processing of wafers necessary for chip production. This etcher/asher was developed to provide superior etching/ashing for a wide range of substrates. The device features a patented and highly efficient temperature-controlled plasma process that enables a broader range of etching and ashing requirements than conventional processing methods. It also comes with a highly customizable and upgradable platform that allows users to tailor the equipment to their specific application needs. The Exelan Flex is designed for ease of use and reliable operation; requiring minimal operator intervention on an intuitive user interface. With an open cassette loading system and the ability to program tools for batch processes, it can quickly and accurately process a wide range of wafers. It is also capable of detecting and correcting errors in real time, thus reducing scrap rates. The Exelan Flex includes features such as an integrated mass flow controller and a fully programmable wafer transfer robot, which enable precise control over process gases and pneumatic vacuum. In addition, the device comes equipped with a sophisticated process controller that is capable of controlling multiple process parameters in order to optimize the etching and ashing performance. The Exelan Flex also features a high-precision imaging unit that provides simultaneous views of the entire wafer at any given time. This powerful imaging machine allows for precise control over the etching and ashing process, as well as the ability to identify hotspots or patterns on the wafer, thus improving yields and reducing losses during production operations. The Exelan Flex offers an environmentally friendly etching/ashing solution, as it operates with minimal chemicals and solvents, and has reduced emissions from video display terminal (VDT) bulbs. With superior performance, flexible platform, and an easy-to-use interface, ONTRAK 2300 Exelan Flex etcher/asher is an excellent solution for any chip production need.
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