Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9095927 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex
ID: 9095927
Wafer Size: 8"
Vintage: 2005
Oxide etcher, 8", 2005 vintage.
LAM RESEARCH / ONTRAK 2300 Exelan Flex is an advanced, reliable etcher or asher designed to perform plasma etching and ashing for a variety of materials. The 2300 is capable of etching and ashing samples as small as 1.25mmx1.25mm with a uniform depth of up to 1000 μm. The etcher includes temperature control of up to 500°C, and dynamic pressure control up to 300mTorr. It also offers a wide range of substrates, including but not limited to TFT, STN, LCD, and printed circuit boards. The machine's compatibility with all major taping systems allows for automated processing and increased throughput. Additionally, the 2300 is capable of processing a wide range of gases: Argon, Helium, Freon, and Hydrogen, as well as organic compounds like Propylene or Ethylene. Additionally, it features automatic wafer transfer, which allows for efficient wafer loading and unloading. The etcher is built with advanced, modular technology, allowing for superior flexibility and scalability. Its graphical user interface (GUI) offers user-friendly functionality, operation, and programming. With its unique Computer-In-Loop feature, the 2300 can communicate with the computer to receive additional parameters such as recipes, temperature and pressure set points, and the amount of plasma time. The 2300 also features an advanced auto matching equipment that adjusts the plasma conditions to optimize the plasma parameters for different etching jobs. The design also enables efficient maintenance, with user-friendly tools for cleaning and replacing parts. The machine is capable of maintaining optimal wafer quality through the automated wafer temperature and pressure control system. In addition, the device is protected with safety measures that include ion pumps, plasma traps, and vacuum exhaust valves. To further protect the unit, the 2300 includes an automated vacuum chamber draining machine and a leak detection sensor. All in all, ONTRAK 2300 Exelan Flex is an advanced, reliable etcher and asher that provides superior flexibility and scalability through its unique, modular design and advanced features. It offers efficient operation, accurate results, and assured safety, making it the ideal machine for etching and ashing a variety of materials.
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