Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9095928 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex is an advanced etcher/asher designed to enable complex substrate-processing applications. The etcher/asher combines high-density reactive-ion etching (RIE) and ash-in/ash-out technologies for patterning and masking substrates in applications requiring high lateral resolution and selectivity. ONTRAK 2300 Exelan Flex is equipped with a variable-pressure air bearing-based motion-control equipment for nano-level precision and repeatability, and also features a highly-efficient multicusp electron-cyclotron-resonance (ECR) radio frequency (RF) source for both etching and ashing. This ECR source enables precise control of etch profiles and selectivity, which leads to faster cycle times and more consistent results. The etcher/asher also features an optimized multizone load-lock with a spindle-drive automated substrate-handling system that ensures a reliable and repeatable delivery of substrates. It also includes an external turbo-pump-based vacuum unit that enables higher throughput. Moreover, LAM RESEARCH 2300 Exelan Flex is designed to be fully automated. Automated process recipes can be programmed for a variety of substrates and processes including multi-chamber ash-in/ash-out and RIE recipes. The hardware and software enables easy integration with existing systems and networks. Overall, 2300 Exelan Flex is an advanced substrate etcher/asher that meets the needs of applications that require high-precision nanometer-scale processes on a wide variety of substrates. With its variable-pressure air bearing motion control machine, optimized multizone load-lock and spindle-drive tool, and its external turbo-pump-based vacuum asset, it offers incredibly fast, precise and consistent results. It is an ideal choice for nanofabrication applications that require sophisticated etching and ashing processes.