Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9119643 for sale

Name: LAM RESEARCH / ONTRAK 2300 Exelan Flex
Brand: LAM RESEARCH / ONTRAK
SKU: 9119643
Availability: SoldOut

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Etchers / Ashers

Manufacturer

LAM RESEARCH / ONTRAK

Model

2300 Exelan Flex

ID: 9119643

Wafer Size: 12"

Vintage: 2008

Dielectric etcher, 12" Process: OX Software Revision: 1.7.2 SP2 HF4 CST2 Factory Automation: OHT PIO Sensor AMHS: AMHS - OHT Carrier: FOUP Interface: 3 carrier stage Online Connection: GEM / CIM JGJ Hardware Interface : Ethernet 100Base-Tx Utility Box: Air/AR2500(SMC), N2/SQ-420E He/SQMICRO(VERIFLO) Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD) Utility Box: Pressure Gauge : Bourdon Gauge Platform Type: Version 2 UPS on system: Yes Earth Leakage Breaker Gas Box: Transport Module, GIB for 16 lines IGS GBX Signal Tower: Red/Orange/Green/Blue EMO: (2) Front, (6) Rear Foreline: Not Heated Sub-panel: Dual Drop Sub-panel Interconnect Cables: TM to sub-panel, 50 ft Pump to TCU: 50 ft TCU to PM: 50 ft PM to Pump Interconnect: 50 ft Inter Lock: Gas Box Door Inter Lock: External Support Remote Units Chiller Lower: ATS DEX 20A Coolant: FC3283 Chiller Hose: 5/8 ID Braided Stainless Flex RF Generator 2 MHz: Including RF Cable Tru-8743-07 RF Generator 27 MHz: Including RF Cable Tru-8743-07 RF Matcher, 2-27 MHz, DFC: RF Matcher, 2-27 MHz, DFC Wafer ID Reader: WIDS Bottom Read Carrier ID Reader: Asyst RF Advantag EIM Server: EIM Server-One EIM server per 8 frames Hardware Configuration Process Ch.1,2,3,&4: 2300 Exelan Flex Wafer Input Buffer Station: KIT,JIT<OPT<25 STATION BUFFER,300MM Endpoint type: Optical Emission Spectroscopy ESC type: Dual Zone/Flex Bipolar Focus ring: Hot Edge, Si High-conductance Wap Ring: 4 Ring Gap: 2.34 cm TMP: ALCATEL ATH,1600M Dry Pump: IH600 Transfer Module Backing Pump: EPX with N2 Gas Module Pressure Monitor: C/M ( Process Monitor ) 628B01TDE1B (MKS ) 1 Torr Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001 Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14 Upper Electrode: Heated Constant Temperature Control Coolant Temp Monitor Kit: Coolant Temp Monitoring Kit for Top Plate & Lower Electrode O-Rings: FluoroSilicone Chamber Isolation Valve: Barrier Seal Door Wafer Lift Mechanism: Direct Drive Gas Position Gas line 1-C4F8 50 sccm- AERA FC-D780CU Gas line 2-O2 50 sccm- AERA FC-D780CU Gas line 3-CHF3 100 sccm-AERA FC-D780CU Gas line 4-CF4 200 sccm-AERA FC-D780CU Gas line 5-30% O2/HE 100 sccm-AERA FC-D780CU Gas line 6-C4F6 50 sccm- AERA FC-D780CU Gas line 7-CH2F2 50 sccm-AERA FC-D780CU Gas line 8-CF4 1000 sccm- AERA FC-D780CU Gas line 9-H2 1500 sccm- AERA FC-D780CU Gas line 10-AR 1000 sccm- AERA FC-D780CU Gas line 11-N2 1000 sccm- AERA FC-D780CU Gas line 12-O2 3000 sccm- AERA FC-D780CU Tuning Gas: 30% O2/HE 50 sccm-AERA FC-D780CU Gas Box Configuration Purge: N2 (Process Grade N2) Filter: Final gas : Mykrolis Gas Box Inlet Option: Regulated Inlet Gas Panel Non-standard PM/GB Feature: Enhanced gas box with 12 gas lines. Gas Line Pressure Transducer: Actual pressure transducer WITHOUT digital readout Regulator: SQMICRO (VERIFLO) Piping: Single Contained Hasteloy Piping (Gas box to Final valve & Exhaust through Gas box) Final Pressure Switch: Absolute Pressure switch 400 torr Lam P/N 796-002833-003 Process Kit Config Upper Outer Electrode: ASSY,ELCTD,OUTER,.18 STEP,300M Upper Inner Electrode: ASSY,ELCTD,INNER,TC,300MM Quartz WAP Ring: RING,WAP,Twist Lock,17IN,300MM Quartz Generic Ring: RING,WAP,QTZ Gas Feed Ring: Ring, Ptn, Gas Feed, Dual Zone Dual Zone ESC: ESCASSY,DZ CLG,2 FNSH,300MM ESC Bolts: ESC Bolts - 10-32 x1.125 lng, vented Edge Ring Cover (In): COV,H/E RING,QTZ Focus Cover Ring: B,FOCUS R CVR,DFC 300MM Hot Edge Ring: RING,HOT EDGE,.195 HGT,SI,DUAL ZONE ESC Edge Ring Cover (Out): RING,COVER,OUTER,GND Fixed Coupling Ring: RING,TOP,ADJ,CPLG,2300,300MM,D Ground Shield: SHLD,GND,300MM,2300 Liner: LINER/SPCR,EXT GND RING,2.0CM GAP 4-ringer Hangers: HANGER,4R,.025,.08-.08-.12-.12,.010FW Retainer Spring: ASSY RETAINER SPRING 1/4-20 Peek Nut: NUT,1/4-20,VIRGIN PEEK Peek Clocking Washer: WSHR,FL,PEEK,.263IDX.682ODX.06THK Peek Sleeve: SLV,ADPTR,SLIP-ON,SELFCNTR,V PEEK 0.010" Peek Pad: PAD,R,CONF,.010THK.300MM 2008 vintage.

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LAM RESEARCH / ONTRAK 2300 Exelan Flex etcher/asher is a flexible, low-cost solution for a variety of etch/ash processes. It is designed specifically for cost-efficient, high-performance, deep etching; and is engineered for excellent uniformity across multiple samples. The Exelan Flex is an all-in-one equipment consisting of a gas delivery system, two autodrimpots, a controller, and a computer-controlled, 50 kHz RF power generator. This etcher/asher features a unique series of resin bead nozzle designs that provide wide area coverage and even etching of large samples. The Exelan Flex offers excellent performance in etching of all types of substrates, with a deep-etching rate of 1.5 microns/min and a total etch depth of 50 microns. This etcher/asher is equipped with a control unit that is capable of delivering reliable and repeatable etch profiles and recipe execution for multiple etch types. The controller provides users with a range of process optimization parameters such as: process time, power, gas pressure, autodrimpot level, and more. Users can control the etch profile from the pulse mode, which offers low to high power etching window, to a constant power etching profile. The Exelan Flex is also equipped with a nitrogen-based backfill machine, allowing for a decrease in the mean free path for electrons and allowing the etching to require less power. The backfill tool also features a level detection probe to maintain a consistent gas backfill pressure. Additionally, a low pressure etch-rate monitor is provided to indicate real-time etch rates and ensure that users can closely monitor the progress of their etch processes. The Exelan Flex comes with an RF generator, tripod, autodrimpots, and controller, making it easy to set up and use. This asset also consists of an advanced controller model that allows users to program and store up to 64 etch recipes for maximum flexibility. Additionally, this controller provides users with an intuitive computer interface and a full-function 7-inch touch-screen color monitor for easy control and monitoring. Overall, ONTRAK 2300 Exelan Flex is an economical and reliable etcher/asher that provides users with a variety of options for flexible etch processes. This equipment offers excellent performance, repeatable etch profiles, and sophisticated control for a range of etching applications.