Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9235397 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex is an advanced etching and ashing equipment designed for high-throughput processing of complex device structures. It is capable of etching oxide, nitride, and other dielectric materials, as well as removing non-volatile carbonaceous organics, at ultrahigh speeds with exceptional uniformity and precision. The Exelan Flex utilizes a dual RF generator, allowing for high etch rates in both AC and DC mode, with adjustable power levels for optimal control. The system also incorporates a multi-source gas delivery unit which enables the introduction of up to three gases during the etching process for added flexibility. The Exelan Flex offers a combination of low-pressure capacitively coupled and inductively coupled plasma (CCP and ICP) etching, providing superior performance for a wide range of device structures. Its state-of-the-art control machine features powerful mathematical logic unit (MLU) algorithms which combine with user-adjustable bias voltage, gas pressure, and other control parameters to achieve superior process repeatability and uniformity. The Exelan Flex also has excellent safety features, meeting the strictest industry standards. Its full-seal environment chamber ensures reliable containment of the process gases and hazardous by-products, allowing for safe operation in a low-pressure environment. It incorporates an automated self-cleaning tool which reduces or eliminates manual labor requirements during operation, and a comprehensive process inventory control asset which automates material handling operations and facilitates fast setup and highly efficient operation. The Exelan Flex has been widely adopted in the microelectronics industry due to its superior performance and reliability. Its ability to process a wide range of dielectric materials at ultrahigh etch rates with excellent uniformity and repeatability makes it ideal for use in production of high-performance integrated circuits, VLSI and ULSI devices, and a variety of other microelectronic components. Its advanced safety features ensure the safety of personnel and equipment, while its comprehensive process control model guarantees consistent results. All these qualities combined make ONTRAK 2300 Exelan Flex an excellent choice for optimal microelectronic device fabrication.