Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9237871 for sale
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ID: 9237871
Wafer Size: 12"
Vintage: 2004
Dielectric etcher, 12"
(2) Chambers
2300 Transport module
Dual arm effector wafer handling, 12"
Automated wafer centering
Flat / Notch finding
User interface
Side monitor
Press gauge in SI unit
Online: GEM 300
(2) 2300 Exelan flex DD etch process modules
Fixed gap electrode / One box
ALCATEL 1600MT
Dual gas feed
Dual zone ESC
Heated upper electrode
(2) 12 Gas configurations
2 PM stack kit
System UPS circuity
Seismic bracket (TM / PM / MWS)
System weight dispersion plate (TM / PM / RPM)
ELB With ring lug
(24) MFC 1661 Units
(2) PIO Sensors
(2) OMRON Tag readers
Analog press gauge in SI unit
Digital press gauge in SI unit
Signal input / Output
Quick cleaning kit
2300 Exelan Pend valve CLN kit
(2) TCU: ATS DEX-20A Chillers
(3) FOUP
2004 vintage.
LAM RESEARCH / ONTRAK 2300 Exelan Flex is a powerful etch and asher equipment specifically designed to meet the needs of the semiconductor manufacturing industry. Built on the patented Exelan processing platform, this advanced system provides the highest levels of precision and performance for both wet and dry etching and ashing. The Exelan Flex unit utilizes an intuitive graphical user interface, allowing users to control individual chambers and monitor conditions during etch and asher operations. A built-in data logger allows users to track and monitor all settings and data points throughout all processes. This data can be used to identify correlations between etch and asher processes and the resulting end-product quality. The highly advanced machine features proprietary processing techniques such as dual mode etching, which allows for simultaneous etching and ashing. This allows users to reduce the time needed for the full etching and ashing process and maintain consistent results throughout all production runs. In addition, the tool offers two-dimensional etching capabilities, allowing for angled or curved shapes to be etched. The Exelan Flex also features a removable hotplate, allowing for easy and accurate maintenance and process control. Additionally, the hotplate has the ability to be heated up to 500°C. This allows users to achieve total process control for advanced etching and ashing processes. Finally, the asset features built-in safety measures, preventing over-temperature scenarios and reducing downtime. Overall, ONTRAK 2300 Exelan Flex is a powerful etching and ashing model that provides users with the highest levels of precision and performance. Through the utilization of dual mode etching, two-dimensional etching, and a removable hotplate, users can ensure consistency and total process control throughout all production runs. Additionally, safety measures and a built-in data logger provide added layers of protection and data tracking.
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