Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9283189 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex is an advanced etch/ash semiconductor processing equipment designed to deliver high-resolution, high-performance results. This system features advanced, versatile technology that enables it to process a wide range of substrates, ranging from the small flakes of Flash/FTL/eMMC memory, to 5" or 6" wafers. It incorporates several advanced technologies to provide superior etch and photo-ash capability with excellent zero-tolerance alignment capability. ONTRAK 2300 Exelan Flex has two chambers which serve different purposes. The upper chamber is a classic etch chamber and is designed to maximize process uniformity and performance. It utilizes continuous wave, RF-Induction, and downstream plasma processing, as well as low power and high power inductively coupled plasma sources. The lower chamber facilitates photo-ash processing of 125mm wafers with consistent and highly uniform results. LAM RESEARCH 2300 Exelan Flex is easy to use and program because of its advanced automation, built-in oven and optional Extended Time Program (ETP) mode. With the ETP capability, users can program a series of processes that run sequentially, saving time and improving results. The unit also has a patented Multi-tool Auto-clamp (MAC) machine that automatically configures the etch process to the load and geometry of the wafer, ensuring optimal results and cycle times. 2300 Exelan Flex is reliable and extremely versatile, providing superior performance and results. It's equipped with multiple process monitoring capability, including in-situ monitoring for plasma gas, tow-point seed presence, and thickness measurements. It also includes a flash cycle algorithm for high speed etching, precise gas flow control, and a temperature control tool to ensure precise, repeatable results. LAM RESEARCH / ONTRAK 2300 Exelan Flex is a reliable, highly adaptable tool that is ideal for production of Flash/FTL/eMMC memory, or other substrates up to 125mm in size. Thanks to its advanced technology, automation and performance-oriented design, ONTRAK 2300 Exelan Flex delivers great results with high yield and repeatability.