Used LAM RESEARCH / ONTRAK 2300 Exelan Flex #9329258 for sale

LAM RESEARCH / ONTRAK 2300 Exelan Flex is a high performance etcher / asher suitable for advanced circuit fabrication. The instrument is equipped with a wide range of features such as a linear drive wafer stage, 12-bit tilt stages, and an Exposure Sensor Placement Scanner. It is designed for both wet and dry etching processes and can be used to etch a variety of thin and thick film structures, ranging from metal interconnects down to 2 microns. Additionally, the 2300 Exelan is suitable for a wide array of processes, including: roughing, creating ultra-shallow junctions, manufacturing contacts, micro trenching, and polyimide etching. The 2300 Exelan features several advanced options, such as a Gas Concentration Control Equipment (GCCS) for controlling etch and deposition processes, as well as a Compact RF Generator (CRG) and programmable power supply (PPS) for precise control of process parameters. Furthermore, the system is equipped with a high resolution spin-coater, plasma source cleaner and rapid ex-situ monitor that allow for precision control of chemistries and critical process parameters. The 2300 Exelan is also capable of high-throughput operation, with up to 100 wafers/hour etching capacity. This throughput is achieved by placing four to eight wafers on the wafer stage for each recipe and then fine-tuning the parameters for each layer of each etch recipe to suit the customer's specific requirements. In addition, the unit is designed to reduce operator-dependent errors, with an intuitive HMI (human machine interface) that simplifies the recipe setup and eliminates tedious manual alignment and calibration processes. The 2300 Exelan is highly versatile in its capabilities; in addition to etching wafer-level metal layers, it can also etch non-conductive materials, such as organic layers, including resist, glass, and nitride layers. The machine is also designed for high-precision applications, with extremely well-controlled gas flow, low particle load, and precise, repeatable parameters. Overall, ONTRAK 2300 Exelan Flex is a high-performance etcher / asher designed to provide superior precision and throughput for advanced circuit fabrication. The tool offers a variety of features to ensure process repeatability, including a high resolution spin-coater, a plasma source cleaner, a GCCS, and a highly intuitive HMI. It is also designed for high-throughput operations, with up to 100 wafers/hour etching capacity and the ability to etch a wide range of material types.