Used LAM RESEARCH / ONTRAK 2300 Kiyo45 #9241856 for sale

LAM RESEARCH / ONTRAK 2300 Kiyo45
ID: 9241856
Wafer Size: 12"
Vintage: 2018
Metal etchers, 12" Process: ETC 2018 vintage.
LAM RESEARCH / ONTRAK 2300 Kiyo45 is an asher / etcher designed to achieve the highest product yield and the lowest cost of ownership. It is capable of processing up to five different wafer sizes in one batch and has a processing speed of up to 100,000 wafers per hour. This system offers superior beam and beam uniformity by utilizing a new and improved mini-fan-beam distribution source. The system employs high-speed, high-efficiency etching, with a selectable range from 30 to 150 microns. ONTRAK 2300 Kiyo45 offers a wide variety of design and processing options to ensure precise processing for each application. It has advanced wafer handling capabilities, including a single-position wafer handler, as well as Sub-Angle Programmable Etch (SPE), which automatically adjusts the angulation of the beam to maintain etch uniformity and eliminate exposure to contaminants. It also has substrate and wafer temperature monitoring with a temperature range of -30 degrees to +150 degrees Celsius and wafer tilt adjustment angles of +7.5 and -10.0 degrees. LAM RESEARCH 2300 Kiyo45 is highly automated with Autofill Dispense and Alignment, LF Carrier and Recipe Management. It is also capable of high-end defect inspection capabilities, which enable the detection of surface contamination and post-etch defects. It also features high-performance 3D wafer mapping capabilities and can be used for improved process yields. 2300 Kiyo45 is a versatile, high-performance asher / etcher solution that can be integrated easily into existing and future production environments. It is designed with advanced safety features and provides an operator-friendly user interface for easy set-up and operation. With its advanced beam and etching technologies, it offers consistent results and optimized yields.
There are no reviews yet