Used LAM RESEARCH / ONTRAK 2300 Kiyo45 #9312590 for sale

Name: LAM RESEARCH / ONTRAK 2300 Kiyo45
Brand: LAM RESEARCH / ONTRAK
SKU: 9312590
Availability: SoldOut

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Etchers / Ashers

Manufacturer

LAM RESEARCH / ONTRAK

Model

2300 Kiyo45

ID: 9312590

Wafer Size: 12"

Vintage: 2009

Etcher, 12" (3) Poly FI Type: Signal tower: 3-Color (3) Loadports ATM Robot (13) Buffer station: 25-Slots, single buffer station Aligner TM Configuration: Loadlock: (2) Loadlocks / 4-Slots cool chamber BROOKS Magatran 7 Robot (4) Rocker valves, P/N: 853-007859-9223 HPS 970 TM Pressure gauge MKS 640 Control Loadlock pressure gauge: Hasting Process module for PM1 / PM2 / PM3: MKS Pressure gauge, 0.1Torr VAT 65048-PH52-ADR1 Throttle valve EDWARDS STP-XA2703CV Tubo pump ADVANCED ENERGY Apex 1513 RF Generator, TCP ADVANCED ENERGY Apex 1513 RF Generator, Bias Gas panel: Type: IGS 16-Channels MFC Type: SEC-Z313M Gas / Range CF4 / 50 SCCM CH2F2 / 50 SCCM H2 / 100 SCCM SF6 / 10 SCCM Ar / 500 SCCM N2 / 100 SCCM CHF6 / 200 SCCM C2F6 / 200 SCCM CF4 / 200 SCCM SF6 / 200 SCCM He / 500 SCCM O2 / 200 SCCM O2 / 20 SCCM Cl2 / 200 SCCM HBr / 50 SCCM HBr / 500 SCCM Power supply: 208 VAC, 3 Phase / (4) wires, 500 Amp, 50/60 Hz 2009 vintage.

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LAM RESEARCH / ONTRAK 2300 Kiyo45 is an etcher/asher tool designed to produce high-precision microstructures with sub-micron feature sizes. This tool is capable of etching/ashing up to 5 mils (127.0 μm) of material in a single pass, and processing substrates with dimensions up to 12"(305.8 mm) in size. It features two independent gas paths, allowing for the etching of metal and non-metal films, as well as alloys. The tool also has an impressive accuracy of ±0.005 mm (0.0002") and repeatability of ±0.001 mm (0.00004"), allowing users to produce high-quality components quickly and efficiently. The etcher/asher unit is equipped with a dual source plasma source which provides a wide range of etching profiles and uniform etch rates. It also has a 15 W CO2 laser, which can apply a laser mark to parts and features a high-resolution camera to monitor the laser beam. ONTRAK 2300 Kiyo45 employs an advanced radio-frequency (RF) power supply with a high-frequency (HF) option, allowing for higher patterning repeatability and improved production throughput. LAM RESEARCH 2300 Kiyo45 is loaded with user-friendly features including a color touch screen interface, automatic substrate recognition, process optimization parameters, and a wide range of process settings. It also features a fast and accurate vision system for providing precise ID detection and vision-assisted substrate alignment. The tool is designed to reduce particle-related imperfections and maximize throughput, and can be customized to meet customers' specific etch and ashing needs. 2300 Kiyo45 is ideal for producing ultra-fine structures with high aspect ratio, small feature size, and minimal post-etch residue, making it perfect for a variety of manufacturing applications such as flat-panel displays, aerospace components, and medical device components. Thanks to its combination of precise etching control, outstanding accuracy, and versatility, LAM RESEARCH / ONTRAK 2300 Kiyo45 is an ideal choice for those looking for a reliable and precise etcher/asher tool.