Used LAM RESEARCH / ONTRAK 2300 Kiyo45 #9407033 for sale

ID: 9407033
Vintage: 2011
Poly etcher 2011 vintage.
LAM RESEARCH / ONTRAK 2300 Kiyo45 is a highly efficient and reliable etcher/asher equipment. It is a multi-chamber platform that can handle a variety of processes on a single wafer, and is designed to meet the stringent requirements of both production and development of commercial and military applications. The Kiyo45 system features several versatile chambers, with a comprehensive set of functions and features. It features a single percussive vacuum pump and a high pressure plasma source, which allows for the completion of etch, ash, and dielectric coat processes on various material surfaces. This combination of features make it perfect for a wide range of specialty applications, such as hard mask etching, air gap deposition, small hole or deep feature formation, and sensing applications. The unit comes with an extensive set of process chambers, which includes an antechamber, main processing chamber, post-etch/ash chamber, post-etch/ash/dielectric chamber, and a dedicated PDMS drying chamber. The machine offers an advanced level of flexibility, allowing for a wide range of process parameters, including unique recipes that can be created and stored in the recipes library. The alternating-pressure main processing chamber is capable of reaching up to 1000 mT in order to accommodate a wide range of substrate types and etch recipes. The Kiyo45 tool is designed with an integrated process control and user rights asset, which provides operators with the ability to customize the dielectric etch, ash, and deposition recipes to fit their specific engineering needs. This is supported further by an in-built power monitoring model, which allows users to monitor the equipment's power output and adjusts it accordingly to ensure a safe process and optimum results. Additionally, the system is equipped with data logging and analytical software, which allows operators to track and analyze process parameters and parameters associated with these processes such as substrate temperature, film thickness, and etch rate. ONTRAK 2300 Kiyo45 is an advanced and efficient etcher/asher unit that is perfect for a variety of production and development applications. Design with a comprehensive set of functions and features, this machine is capable of completing a wide range of process parameters with precision. With its advanced process control and user access tool, along with data logging and analytical software, this asset is an ideal choice for any etch and ash model needs.
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