Used LAM RESEARCH / ONTRAK Kiyo 45 #293589469 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is a dry etcher or asher that provides an efficient and uniform plasma etching or ash deposition process. This high throughput processing unit is a reliable solution for plasma etching, ash deposition, and through-wafer uniformity processes used in the semiconductor, MEMS, and electronics industries. ONTRAK Kiyo 45 features a two-zone process chamber, with a large main processing chamber and a smaller second chamber used for pre-clean and post-clean processing. The main chamber has a flat etching target stage, capable of supporting up to 20 substrates. The target stage also features a substrate-to-wafer mapping function to ensure uniform deposition across the entire wafer. The unit also includes a quartz liner and an in-situ plasma-cleaning system for precise control of etching or deposition rate and uniformity. LAM RESEARCH Kiyo 45 can be operated using either a vacuum-free or a high-vacuum process. A wide range of gases and gas blend combinations can be used, allowing for processing of materials ranging from GaAs, SiGe, AlN, and diamond-like carbon. The system also includes an automated RF/DC power generator, allowing for a precise control of etch or deposition rate. In terms of safety, Kiyo 45 features an automated shut-off function in case of emergency, while the built-in vacuum monitor and ion-sensitive detector provide a hands-off approach towards the etching process. Furthermore, a variety of safety features, such as gas leakage monitors, sparkless purge valves, and a high-frequency leak detector add to the overall safety of the device. To conclude, LAM RESEARCH / ONTRAK Kiyo 45 is a turnkey etcher/asher designed to enable an efficient, reliable and uniform plasma etch or ash deposition process for a wide range of applications. Its safety and throughput features, along with its ease of use and integration into a variety of production and research operations make ONTRAK Kiyo 45 a great choice for those looking for a reliable high- throughput etch or deposition process.