Used LAM RESEARCH / ONTRAK Kiyo 45 #293589472 for sale

LAM RESEARCH / ONTRAK Kiyo 45
ID: 293589472
Vintage: 2009
System 2009 vintage.
LAM RESEARCH / ONTRAK Kiyo 45 is an advanced etcher/asher designed for high-end processing of materials such as silicon, nitride, quartz, glass and similar materials. The full-featured process chamber has been designed with a rectangular quartz platen and a larger turntable to allow for user-controlled positioning of the wafers. This machine is capable of etching and ashing a wide range of material sizes up to 18 inches. It is constructed with a comprehensive range of process capabilities including a process chamber, wafer transport and robotic automation systems. ONTRAK Kiyo 45 is a fully compatible process tool equipped with a TCP load lock and advanced plasma etching processing capabilities. It is also equipped with an independent control equipment, allowing for customization of the system parameters to meet specific application needs. This machine uses a ceramic firing element to provide precise temperature control for wafer processing. It supports multiple etch and ashing processes, allowing for increased production output and quality control. LAM RESEARCH Kiyo 45 provides an automated wafer handling unit which consists of wafer loading, transport and unloading, as well as automated plasma source control. This machine's plasma source can handle a wide range of etching and ashing parameters, allowing users to easily customize their processes to meet their specific application requirements. It also offers an advanced machine for monitoring process parameters to ensure efficient, safe and repeatable processes. Kiyo 45 includes an optional purge chamber to prevent the cross contamination of process gases and airborne particles. The tool is also equipped with a powerful exhaust asset for collecting byproducts. The model can be configured for manual or automatic operation, allowing users to select the best processing method for their specific program. The equipment's integrated high frequency generator and post processing system also allows for controlled ablation of the etched material. LAM RESEARCH / ONTRAK Kiyo 45 is a highly advanced etcher/asher suitable for a wide range of applications. Its advanced process chamber, automated wafer handling and powerful exhaust unit provide a user-friendly environment for efficient processing. The added TCU Load Lock and plasma source provide flexibility, while its integrated high frequency generator, purge chamber and post-processing machine ensure precision and repeatability, resulting in superior process results.
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