Used LAM RESEARCH / ONTRAK Kiyo 45 #293589654 for sale

LAM RESEARCH / ONTRAK Kiyo 45
ID: 293589654
Vintage: 2011
System 2011 vintage.
LAM RESEARCH / ONTRAK Kiyo 45 is an advanced etcher/asher. It offers superior performance, low cost-per-wafer, and reliable etching/ashing processes. ONTRAK Kiyo 45 is a high speed, multi-zone etch/ash capable of etching/ashing wafers from 2 inch to 8 inch in diameter. It is equipped with a dual-zone chamber and a large process chamber that allows for high throughput and low cycle times. The dual-zone chamber provides for high precision, consistent etching/ashing parameters. LAM RESEARCH Kiyo 45 offers advanced process control capabilities. It is equipped with a programmable, telescoping conveyor that moves wafers into the process chamber. This conveyor can be programmed to move and hold wafers in various positions, allowing for precise and repeatable positioning for the etch/ash. Kiyo 45 also features a wide variety of substrate materials, including quartz, polysilicon, silicon, metal, and dielectrics. It supports process temperatures up to 950°C and pressures up to 170 torr. LAM RESEARCH / ONTRAK Kiyo 45 is capable of both batch and single-wafer processing. It features remote process monitoring capabilities, enabling users to monitor their processes' progress from remote locations. ONTRAK Kiyo 45 also features vacuum process pressure control, closed-loop chamber temperature regulation, and closed-loop process chemistry control. It is equipped with a state-of-the-art, color graphic user interface and an optional Windows computer controller. LAM RESEARCH Kiyo 45 is designed for maximum reliability and is backed by a comprehensive warranty. Its design is based on advanced process integration, allowing for easy maintenance and operation. It also features advanced diagnostics, allowing for quick and accurate troubleshooting. Overall, Kiyo 45 is a powerful, reliable and cost-effective etcher/asher, providing superior performance and added value to a broad range of processes.
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