Used LAM RESEARCH / ONTRAK Kiyo 45 #293652871 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is an asher / etcher designed for the processing of a wide range of materials. It features an intuitive automated control system, an advanced source/target chamber capable of working substrates up to 500 mm in size, and advanced digital metrology for precision processing. The advanced digital metrology package achieved by utilizing ONTRAK patented Sensor Fusion Technology auto-tunes the recipe's parameters for accuracy and repeatability. ONTRAK Kiyo 45 features an advanced source/target chamber capable of working substrates up to 500 mm in size and a wide range of chemistries. It is also equipped with a process window monitoring package that continuously evaluates the state of the process in real time and its Process Control System (PCS) automatically adjusts the tasking parameters in order to improve repeatability and quality. An add-on package of advanced gas flow control accessories, such as mini-vacuum, remote vacuum and temperature uniformity, can be used to further optimize the process performance. Designed with industry-leading capabilities, LAM RESEARCH Kiyo 45 is capable of achieving industry-leading accuracy and repeatability. Its advanced materials compatibility and process control capabilities enable the user to optimize etch rates for technically challenging materials and substrates. It supports a wide range of etching chemistries, so it can be used for all types of etching applications. Additionally, its automated endpoint detection capabilities enable quicker detection of etch endpoints and more consistent yields. Kiyo 45 is designed for maximum uptime and operational efficiency. It features a revolutionary low maintenance design that allows for quick and easy cleaning of components, with minimal downtime for maintenance. Additionally, its advanced metrology suite enables the user to quickly evaluate process results, minimizing the need for calibration or recipe adjustments. Overall, LAM RESEARCH / ONTRAK Kiyo 45 is a powerful and reliable etcher / asher designed to handle a wide range of materials. Its advanced and intuitive control system, wide array of chemistries, process window monitoring, and revolutionary low maintenance design make it a perfect choice for precision processing and increased operational efficiency.