Used LAM RESEARCH / ONTRAK Kiyo 45 #9298319 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is an advanced etching and ashing equipment designed for precision microfabrication applications. ONTRAK Kiyo 45 is an integrated system that combines two independent processes - reactive ion etching (RIE) and deep ashing - in one platform to provide maximum process efficiency and performance. Utilizing a single high-pressure processing chamber, the unit can operate both processes simultaneously or separately to enable multi-layer film etching and ashing. LAM RESEARCH Kiyo 45 is designed to achieve optimal process results with a maximum substrate size of 6.5"x6.5", with high levels of repeatability achieved with uniformity in etch rates. It features an AutoGain Control machine that maintains the power of the process chamber for improved process control and repeatability every time. The enhanced magnetic levitation turbo pump also reduces vibration levels for more accurate processing. Kiyo 45 also provides superior etch profile control due to it's adjustable gas flow rates, and a programmable controller which allows the user to individually modify process parameters like pressure, total flow, and gas flow composition. The tool also offers the flexibility to recipe store, recall, and execute any number of user-defined process flows. In addition to offering precise control and high accuracy, LAM RESEARCH / ONTRAK Kiyo 45 also offers numerous safety benefits for protecting users, operators, and the environment during processing. It features a three-level watch sensor monitoring asset that checks safety levels at each stage of the process to prevent accidents. The process chamber is completely enclosed within a nitrogen blanketing model to ensure the safe containment of chemical vapors during operation, and its materials compatibility prevent potential hazards from hazardous materials. ONTRAK Kiyo 45's integrated process control equipment offers intuitive user controls to allow for efficient operation and easy maintenance. The system also offers remote access for service and improvements, as well as advanced measurement tools for further data analysis of etching processes. Ultimately, LAM RESEARCH Kiyo 45 provides a reliable platform for microfabrication applications, offering users an advanced etching and ashing solution with superior performance and flexibility.