Used LAM RESEARCH / ONTRAK Kiyo 45 #9299367 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is a highly efficient and versatile batch etcher/asher designed for the fabrication of high quality and reliable semiconductor device structures. ONTRAK Kiyo 45 offers a unique and advanced etch capability specifically designed to produce complex device geometries, enabling fabrication of the most advanced semiconductor devices. LAM RESEARCH Kiyo 45 comes equipped with a power supply capable of producing a Vmax output current of 100kV and an etch rate of up to 30nm/min. The power supply also offers controllable mask gap and dose parameters for more precise etching and conformal masks. An advanced chamber and coil design provide improved uniformity of etch patterns and minimized roughness. Kiyo 45 also features a larger chamber size of up to 120mm wafer, a larger capacity ac, and an extended dwell time setting up to 109 seconds. LAM RESEARCH / ONTRAK Kiyo 45 features an automatic motorized load lock and robotic wafer transfer system combined with a touch screen operator interface, allowing for efficient wafer handling and easy operation. Additionally, the operator interface also offers real-time feedback of wafer position and etch status. Advanced nozzle control allows for a wide beam angle, providing higher uniformity of etch, as well as improved resolution and a lower risk of tip damage and drift. ONTRAK Kiyo 45 provides a high degree of purity and safety, featuring an integrated mini clean-room, low-profile and automatic gas-flow control systems, and integrated vacuum safety valve to prevent any hazardous gas leakage. Clean-in-place and purging systems are also offered to eliminate wafer contamination from foreign particles. The Kiyo 55 is also RoHS compliant, providing additional safety and environmental benefits. LAM RESEARCH Kiyo 45 is a precision etcher / asher made for high-end semiconductor fabrication. Kiyo 45 offers a range of advanced features such as an automated motorized load lock, improved uniformity of etch pattern, extended dwell time, and high levels of safety and purity. LAM RESEARCH / ONTRAK Kiyo 45 is the perfect device for fabricating the most advanced semiconductor structures and devices with the highest level of reliability and accuracy.