Used LAM RESEARCH / ONTRAK Kiyo 45 #9314593 for sale

LAM RESEARCH / ONTRAK Kiyo 45
ID: 9314593
Wafer Size: 12"
Vintage: 2010
System, 12" 2010 vintage.
LAM RESEARCH / ONTRAK Kiyo 45 is an etcher/asher designed for ultra-high-speed, ultra-high-accuracy semiconductor processing. It is an in-line, single-pass equipment that can etch or ash up to 30 millimeters of up to 40 millimeters. The system is equipped with a high-powered, high-speed Smart Source Generator laser that enables the highest throughput and accuracy rates for an etcher/asher. ONTRAK Kiyo 45 features a field-configurable tooling stage that can be configured to accurately etch and ash various device sizes and substrates. The unit's active beam alignment ensures the highest levels of accuracy and process repeatability. It also comes with a self-locking tooling machine and integrated process control tool. LAM RESEARCH Kiyo 45 offers an automated batch feature that allows up to 300 jobs to be scheduled and processed automatically. The asset also offers extended process control capabilities, such as process repeatability and programmable etch times. Additionally, the model is equipped with a communications interface for job transfer and remote process control. Kiyo 45 has a range of safety features, including interlocked guards, audible alarms, and a reflective back chamber for safety. The equipment also features a 6-axis motion control system that is designed to eliminate vibration, and an ultra-precise galvanometer unit to ensure accurate and repeatable positioning. LAM RESEARCH / ONTRAK Kiyo 45 is an industry-leading etcher/asher built with advanced technology for high throughput and accuracy. The machine offers an array of features and is suitable for applications ranging from small substrate processing to multi-device production. With its advanced process control tool and intuitive user interface, ONTRAK Kiyo 45 is an ideal solution for a wide variety of semiconductor processing needs.
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