Used LAM RESEARCH / ONTRAK Kiyo 45 #9315258 for sale
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LAM RESEARCH / ONTRAK Kiyo 45 is an etcher/asher designed for use in the semiconductor industry. It is capable of performing both etching and ashing processes of semiconductor materials at high temperatures. Its engineer-friendly design makes it easy to set up and operate with minimal user training. The design of ONTRAK Kiyo 45 is optimized for high quality, high speed process performance. It uses a high temperature graphite evaporation source to gasify high purity elemental source material on a substrate. This allows for high throughput processes of up to 50 wafers per hour with minimal variation in film thickness and uniformity. LAM RESEARCH Kiyo 45 also includes a multi-zone programmable hotplate that can accommodate up to 16 wafers. This allows for exact temperature control of up to five different zones, making it possible to etch and ashing specific elements at different temperatures. Kiyo 45 can accommodate a wide range of wafer sizes and thicknesses, making it suitable for various processes in the semiconductor industry. LAM RESEARCH / ONTRAK Kiyo 45 etcher/asher is also designed for automated operation. It includes a recipe management equipment that allows users to easily program the etch and ashing parameters and then store the settings for future use. This system also provides real-time feedback from the process so the operator can be sure that the desired etching and ashing parameters are met. A comprehensive recipe manual is included as well, providing an easy guide to understanding and setting up the appropriate parameters. ONTRAK Kiyo 45 is designed for long term reliability and cost-effectiveness. It has an advanced wafer handling unit and automated cleaning routine that minimizes particle contamination and ensure the quality of the process. The machine is also designed for easy maintenance with quick-release wafer aligners, removable covers and easily-serviced pumps and sensors. Overall, LAM RESEARCH Kiyo 45 is an advanced etcher/asher designed to meet the needs of the semiconductor industry. It offers a combination of high quality, high speed processing, multi-zone temperature control and easy automation make it an excellent choice for many types of etching and ashing processes.
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