Used LAM RESEARCH / ONTRAK Kiyo 45 #9351382 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is an innovative etcher/asher designed to deliver superior etching and ashing performance. This equipment utilizes a multi-stage shell reactor to effectively achieve etch rates of up to 200nm/min and ashing rates of up to 40nm/min. Its compact design and intuitive user interface make it ideal for a variety of tasks such as wafer fabrication, pattern removal, RIE, MEMS devices, and others. ONTRAK Kiyo 45 is equipped with an advanced magnetron source providing a high-density plasma with a low-pressure operation. This helps improve etch and ashing operations yields and repeatability. The etcher/asher also provides an improved process window with repeatable results due to its closed-loop power control system. It has a wide range of options for wafer sizes ranging from 6" to 12" and can be configured for up to 12 recipe slots for easy and efficient production. LAM RESEARCH Kiyo 45 is a reliable, cost-effective etcher/asher with versatile capabilities to meet various process requirements. Its intuitive user interface and advanced flow control allow for easy yet effective process optimization. The data logging unit helps record process data, allowing for rapid problem-solving and troubleshooting. Additionally, the modular design and open architecture make it easy to add and remove components on the fly. For safety, Kiyo 45 is designed with robust interlocks that protect users and process tools from harm. The unit's chamber is sealed and vented to mitigate contamination with its tight sealing flange. The etcher/asher also has an integrated safety circuit for complete electrical machine protection. LAM RESEARCH / ONTRAK Kiyo 45 is an excellent etch/ash tool that provides repeatable results while addressing various process demands. It is a reliable and cost-effective tool that helps ensure operational efficiency and yields. With its multi-stage shell reactor, efficient design, and robust safety features, ONTRAK Kiyo 45 is an ideal choice for a wide range of etching and ashing needs.