Used LAM RESEARCH / ONTRAK Kiyo 45 #9358696 for sale

LAM RESEARCH / ONTRAK Kiyo 45 is a high performance etcher and asher for a wide range of applications. The equipment is designed for easy operation, allowing operators to maximize throughput and minimize downtime. It provides high resolution and uniform processing for critical etch and ash operations. The system utilizes advanced pulsed DC plasma technology, enabling precise control of etch and ash processes. It features advanced automation and safety options, like automatic substrate wafer handling and real-time monitoring and control of process parameters. With its advanced control capabilities, the unit can also be used for in-line plasma surface modification. The machine offers a full range of processes including etching, ash, etching/ash/clean, etching/ash/clean/etch, and cleaning. It can process both positive or negative photoresist applications. The patented E-mechanism provides a high etch rate, high uniformity, and a low round-end profile for most etch applications. ONTRAK Kiyo 45 is configured with an integrated gas box for platen shield processing, optimized deposition/etch performance, and e-field uniformity. It has a small footprint and is equipped with dual chuck covers to provide excellent isolation of the chuck during processing. With its advanced control machine, LAM RESEARCH Kiyo 45 offers process monitoring and monitoring of other critical parameters like temperature, pressure, and pressure-curvature response. For enhanced safety, it's equipped with multiple built-in safety features such as a RF on/off switch, an interlock switch for mechanical access, an isolated chamber, and an expandable emergency stop tool. The asset also includes additional features such as an integrated remote monitoring and control model, reflow capabilities and an oxygen/nitrogen generator. Kiyo 45 is designed to be compatible with other ONTRAK products, providing operators a great platform to build on. With its versatility and robust features, the LAMLAM RESEARCH / ONTRAK Kiyo 45 is an excellent choice for a wide range of etching/ash operations.