Used LAM RESEARCH / ONTRAK Kiyo 45 #9379095 for sale

LAM RESEARCH / ONTRAK Kiyo 45
ID: 9379095
Wafer Size: 12"
Vintage: 2007
Etcher, 12" 2007 vintage.
LAM RESEARCH / ONTRAK Kiyo 45 is a gaussian asher/etchant tool that combines advanced etching and ashing processes in one equipment. It is designed to etch and ash small through medium-sized substrates with high precision and uniformity. The system is equipped with advanced source control, support for global processes, and a host of other features. The LAMONTRAK Kiyo 45 features a Gaussian plasma source that provides adjustable power, pressure, and density to produce uniform depth, sidewall, and top profile etch and ashing jobs. The unit is fully programmable for process standardization and improved substrate yield. LAM RESEARCH Kiyo 45 is also equipped with an Automatic Pressure Control (APC) for controlled etching and ashing, and an Exhaust Gas Flow Structure (EGFS) to ensure safe operation. Kiyo 45 also features a reaction chamber designed for uniform gas distribution that ensures repeatable etching and ashing results, even on substrates with complex geometries. In addition, the machine uses advanced gas fill techniques and a wafer mapping tool to detect process variation and ensure a consistent global process across different products. LAM RESEARCH / ONTRAK Kiyo 45 is also designed for easy maintenance. The chamber is equipped with a lift mechanism to facilitate quick wafer exchange, while the asset itself features a touch-screen interface to allow for quick and easy process parameter changes. The model features a range of advanced features such as detection suite for quick process troubleshooting, integrated process monitoring, and networking capabilities. Overall, ONTRAK Kiyo 45 is an advanced etching and ashing equipment designed to provide a complete and uniform etching & ashing process on small to medium sized substrates. It features a full range of advanced features to help ensure process stability and repeatability, as well as an easy-to-use interface for process adjustment and tracking.
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