Used LAM RESEARCH / ONTRAK TCP 9400 SE #293587268 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE
ID: 293587268
Wafer Size: 6"
ICP Etcher, 6".
LAM RESEARCH / ONTRAK TCP 9400 SE is a fully automated etcher / asher designed to meet the needs of today's semiconductor production facilities. It offers precision etching and ashing of photomasks and other materials in an efficient, step-by-step manner. ONTRAK TCP 9400 SE is capable of processing a variety of materials and offers flexibility in the size and shape of masks. It offers eight different mask configurations, including the ability to etch one, two or three layers and has onboard pattern recognition for alignment. It also offers precision temperature control and a highly reliable integrated process automation system. LAM RESEARCH TCP 9400 SE utilizes advanced etch and ashing technology, with a primary objective of removing contaminants from all surfaces. An oscillating electrodes submerged in a liquid medium is utilized for the etching process, and a heated furnace chamber with a plasma torch is used for the ashing process. The etching electrode can adjust its position to achieve optimum etching, while the torch can reach temperatures up to 2000°C to rapidly etch the material. TCP 9400 SE is capable of maintaining the etching and ashing parameters within preset limits, using a combination of different controllers and measuring instruments. Temperature sensors, position sensors, pressure transducers, and flow meters are used to monitor all elements of the etching and ashing process to ensure precision and consistency. LAM RESEARCH / ONTRAK TCP 9400 SE is equipped with a comprehensive suite of software and hardware enhancements, including a graphical user interface (GUI), user-defined procedural automation, and data logging. The GUI allows the user to easily define the process steps, while the user-defined procedural automation enables the user to modify the automated process steps to customize the operations. The data log stores results and can be used to display trends, and store process information. ONTRAK TCP 9400 SE is ideal for high-volume processing, and it features a durable frame construction with a built-in safety and quality assurance system. It is CE certified and meets the most stringent international standards to ensure consistent and reliable performance.
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