Used LAM RESEARCH / ONTRAK TCP 9400 SE #293595661 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE
ID: 293595661
Wafer Size: 8"
Etcher, 8".
LAM RESEARCH / ONTRAK TCP 9400 SE is a highly advanced etcher/asher designed to provide superior precision and repeatability in etching and ashing semiconductor materials. This etcher/asher utilizes a dual arm, vertical axis platform and is equipped with a high-powered laser that is capable of delivering outputs up to 5 kW and with a variable power option. ONTRAK TCP 9400 SE offers the highest accuracy and repeatability in the industry, with a defect-free environment monitored and controlled by the latest in network and control technologies. The equipment is equipped with a 20-seat control room providing the user with greater flexibility and many options, including multiple-recipe databases and a complete suite of software and hardware applications. LAM RESEARCH TCP 9400 SE is also designed with a modular, expandable architecture, allowing users to set up the system to meet their needs. With the addition of various optional features, such as high-frequency wafer handling, automated mapping, and high speed control, TCP 9400 SE is capable of working with most semiconductor materials. The unit also features advanced etching and ashing capabilities, with integrated systems for both wet and dry processes that can process wafer sizes up to four inches in diameter. LAM RESEARCH / ONTRAK TCP 9400 SE is equipped with an integrated software package that provides advanced process guidance, programmed recipes, safety machine monitoring, and statistical process control (SPC) capabilities. The software package also includes a comprehensive range of digital and analog interface devices. The tool is also capable of producing very fine etch and ashing results, with feature sizes of 0.001 μm and repeatability of 0.5 μm. The asset has been designed with the industry's highest containment standards, to protect both the product and surrounding personnel from potential contaminants. With its impressive capabilities and superior precision, ONTRAK TCP 9400 SE provides industry-leading etching and ashing solutions for semiconductor manufacturers.
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