Used LAM RESEARCH / ONTRAK TCP 9400 SE #9099538 for sale

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ID: 9099538
Wafer Size: 8"
Etcher, 8".
LAM RESEARCH / ONTRAK TCP 9400 SE is a high performance etcher/asher for the processing of semiconductor materials. This tool is designed to provide the highest levels of precision and repeatability, thereby enabling its users to achieve the highest yields and yields for their device fabrication processes. ONTRAK TCP 9400 SE features an advanced, programmable laser-based equipment that ensures precise material removal characteristics to achieve desired device characteristics. It is equipped with a high-power argon laser for etching and a low-power laser for ashing, thus making it suitable for both materials etching and surface ashing. The laser system is further equipped with a sophisticated closed-loop control unit for precision ablation and a scanning machine for optimizing ablation patterns. The machine also offers a multi-chamber chamber sputter source for higher level of precision in the deposition process. This sputter source is equipped with various advanced materials such as Aluminum, Copper, and Titanium, to provide the best possible features and performance based on the user's applications. It also includes a fully automated cleansing tool for continuous cleaning of the chamber between etch and ashing processes. Automatic fast shuttering is supported for multi-step processes. LAM RESEARCH TCP 9400 SE etcher/asher comes with an integrated wafer management asset, allowing users to use the machine in a fully automated or manual mode. This model also offers wafer tracking and product tracking capabilities for total process control. The machine is also equipped with an advanced material-handling equipment enabling manual loading and unloading of wafers and substrates. In terms of system safety and reliability, TCP 9400 SE comes with an advanced interlock unit as well as an emergency shutdown machine that shuts down the entire process in case of any emergency. In addition, it is also equipped with a touch-screen user interface with dedicated recipe management for easy and convenient use. LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced semiconductor etcher/asher designed for the most demanding applications. With its highly accurate and repeatable control systems, it ensures users the highest levels of device yields and process repeatability. Its safety and user interface features make it a highly reliable and user-friendly tool for modern semiconductor fabrications.
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