Used LAM RESEARCH / ONTRAK TCP 9400 SE #9134003 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE is a semi-automatic etcher and asher. It is a single-wafer equipment designed for a wide range of etching, ashing, and deposition processes. It features two gas chambers, each with independent flow and temperature control. It also features an automatic substrate centering system for precise wafer positioning and the capability to perform both wet and dry processes in a single run. The unit is equipped with a high-performance PC based control machine and easy-to-use Windows™ style software interfaces. The programmable process recipes provide process set-up capabilities, data storage for up to 20 user-defined processes, as well as flexible process control with a large selection of parameters. The tool also includes a monitor strip chart that allows the user to quickly view process data and identify problems. ONTRAK TCP 9400 SE can handle a wide range of substrates including silicon wafers, photolithography masks, quartz and ceramic. The wafer chambers can accommodate up to 400mm, 200mm, and 150mm round substrates. The asset also offers a wide variety of etching and ashing reactions for aluminum, polysilicon, titanium, silicon, and other materials. The model includes an integrated safety interlock equipment for maximum protection. It also includes an Endpoint Detection Subsystem (EDS) which helps the operator monitor substrate damage, as well as a Fast Cooling Subsystem (FCS) which aids in preventing thermal damage during the etching process. The system offers excellent performance for a wide range of etching and ashing applications. Its high-performance controller and software make automated processing quick and easy. The unit also offers outstanding safety features and protection for both the operator and the substrates. All these features make LAM RESEARCH TCP 9400 SE an excellent choice for process engineers.