Used LAM RESEARCH / ONTRAK TCP 9400 SE #9181362 for sale

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ID: 9181362
Poly etcher.
LAM RESEARCH / ONTRAK TCP 9400 SE is a state-of-the-art etcher/asher designed for semiconductor manufacturing. It offers a single-ended three-axis mechanical motion equipment for accurate and repeatable etch and ash processes. ONTRAK TCP 9400 SE is able to achieve larger open area factor (OAF) etches than conventional circular etch systems, reducing the number of re-coatings required. LAM RESEARCH TCP 9400 SE can make up to two-micron etches and can precisely etch a variety of wafer sizes, from 150mm to 300mm. TCP 9400 SE utilizes ONTRAK proprietary MatchMotion technology. MatchMotion technology is a software system that coordinates all three axes during etching, eliminating misalignment and reducing the need for frequent recalibrations. The unit also utilizes PatchMotion technology to create programmed, optimized etches for specific applications. It is also compatible with MaskAdapt algorithms to maximize throughput for semiconductor device fabrication. LAM RESEARCH / ONTRAK TCP 9400 SE allows for precise control of the etching process, which is critical in semiconductor manufacturing. The machine utilizes a closed-loop feedback tool to ensure the etch is precise, with a repeatable result over multiple batches. The asset also includes a real-time optical inspection feature that can detect imperfections during etching, allowing corrections to be made immediately. Additionally, ONTRAK TCP 9400 SE is configurable to various pressures, temperatures and process chemistries for a variety of etch and ash processes. In addition to its accuracy and precision, LAM RESEARCH TCP 9400 SE is designed for maximum efficiency and convenience. The model's automated cassette-to-cassette capabilities allow for multiple wafers to be processed without manual intervention. It also features an integrated exhaust equipment to keep the work area free from harmful fumes. Additionally, the system is equipped with multiple die configurations and comes with a complete suite of diagnostic tools for ease of maintenance and unit optimization. In conclusion, TCP 9400 SE is a reliable and versatile etcher/asher designed for semiconductor manufacturing. It offers a single-ended three-axis motion machine that enables precise, repeatable etching and ashing processes. It also includes features such as MatchMotion and PatchMotion technology, MaskAdapt algorithms, optical inspection, automated cassette-to-cassette capabilities and a complete suite of diagnostic tools. LAM RESEARCH / ONTRAK TCP 9400 SE is an ideal solution for semiconductor device fabrication.
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