Used LAM RESEARCH / ONTRAK TCP 9400 SE #9223304 for sale

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ID: 9223304
Etcher Electro Static Chuck (ESC) Envision CPU card installed All available transport improvement upgrades are installed Missing: (2) ADIO cards Indexer Exit load lock cover.
LAM RESEARCH / ONTRAK TCP 9400 SE is an etcher/asher capable of performing critical etching and ashing operations for a range of materials in a wide variety of industries. Its unique design, built for cost-effectiveness and scalability, allows it to be used for a number of different applications. This machine has a high-speed wafer transport equipment and the ability to rapidly cycle between high-pressure, low-pressure, etch, and ashing operations while maintaining process repeatability. With a reduced consumables use and high throughput capabilities, ONTRAK TCP 9400 SE delivers maximum performance and process control. The heart of LAM RESEARCH TCP 9400 SE is the ceramic enclosed type plasma chamber design. This feature was engineered for optimal heat transfer and safe, efficient use of the process gas. The ceramic chamber retains a high degree of temperature uniformity to ensure a rapid and repeatable etching operation. To further optimize etching performance, this machine has integrated process pressure monitoring, which allows for fine-tuning and ensures consistency. To ensure repeatability and accuracy, TCP 9400 SE incorporates a patented Feedback Control System (FCS). The FCS operates by monitoring the filament voltage profile on the wafer and automatically adjusts the process pressure and time according to preset conditions. This allows the unit to regain process control if a wafer properties change during the etching process. LAM RESEARCH / ONTRAK TCP 9400 SE also has a digital process recording machine. This tool stores all process parameters during each etch cycle making it possible to recreate the exact process parameters for each wafer that is processed. Additionally, the process variables stored in the data base allow for statistical process control and process improvement if needed. The process recipe software allows the machine to store multiple recipes for different wafer types and perform them automatically. It can also store batch average data and process related information. This makes it easy to save, review, and export etching logs for quality control and quality assurance purposes. Finally, ONTRAK TCP 9400 SE is designed for ease of use and maintenance. It has a large front-panel display with easy to use operator controls to allow for quick, simple operation. For maintenance, all critical components are easily accessible from the outside of the machine. LAM RESEARCH TCP 9400 SE is a versatile, dependable, and reliable machine that is perfect for those wanting to increase their productivity and efficiency in their etching and ashing processes.
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