Used LAM RESEARCH / ONTRAK TCP 9400 SE #9412757 for sale

LAM RESEARCH / ONTRAK TCP 9400 SE is an advanced etching/ashing equipment designed with the most demanding applications in mind. ONTRAK TCP 9400 SE is a pulsed plasma source based on a patented, three-chamber, closed-loop process. Its revolutionary on-board automation system, combined with process control software, enables highly reliable process tools. This etching/ashing unit has a wide operating window from a 10 milliwatts up to 500 milliwatts. It supports a variety of gases including chlorine, fluorine, and carbon dioxide. The adjustable etch rate, combined with the variable pulse asymmetry makes it ideal for a wide range of etch/ash processes. This machine also utilizes a patented convergence zone chamber that helps to eliminate problems associated with conventional etching systems such as edge damage, mask erosion, and arc drifting. LAM RESEARCH TCP 9400 SE is designed for high throughput and productivity. The open architecture allows for optimization of materials, processes and features. The tool also supports multiple recipes and provides excellent repeatability. It has an intuitive industrial user interface with an LCD touch screen and a graphical job editor. The intelligent real-time process adjustment tool allows for optimization of recipes in a few minutes. It also includes an automated wafer-level diagnostic asset to detect any model issues before it becomes a problem. TCP 9400 SE has several advanced safety features such as solar panels and lasers that detect leaks in the chamber. It also features EFEM compatibility, allowing it to be integrated into automated systems. The equipment has a small footprint, making it easy to install and maintain. LAM RESEARCH / ONTRAK TCP 9400 SE is a powerful solution for developing a full range of advanced technologies involving etch/ash processes. It is ideal for applications such as high precision patterning, contact openings, device isolation, and mask repair. This system is ideal for customers who need the most advanced etching/ashing unit available, with superior repeatability and process control.