Used LAM RESEARCH Rainbow 4000 Series #9169565 for sale

LAM RESEARCH Rainbow 4000 Series is an advanced plasma etcher/asher that is designed for semiconductor device fabrication. This equipment provides a highly accurate and controllable etching process for high-precision patterning of silicon wafers and other advanced materials. It is suitable for etching metal, polysilicon, silicon dioxide, quartz, nitride, and dielectric materials. This system is equipped with advanced features such as independent plasma and etch gas densities, and a high-end gas delivery mechanism. Its integrated processing control software supports precision recipes and in-situ optical end-point detection. Rainbow 4000 Series is equipped with a multi-source, high-power inductively-coupled Plasma (ICP) source that creates a uniform plasma in the process chamber. It is capable of producing high-density plasma with precise control over density and power. The plasma generator can deliver up to 25kW of power with rapid turn-on and turn-off cycles, allowing for a high etch rate. The high-density plasma is also suited for processes requiring very low oxygen-bearing species. The Rainbow 4000 also utilizes a highly controllable gas delivery unit. This machine is capable of delivering up to five different gases simultaneously. Depending on the etch process, the gases can include three etchant species, a passivation gas to minimize etch depth variability, and a purge gas to remove byproducts. The soft open and close flow controls ensure constant etch chamber pressure and uniform etch uniformity. The tool is also equipped with advanced controllers for precise and repeatable process results. Rainbow 4000 systems provide in situ end-point detection to monitor the end of the etch process. The asset also uses a 'SoftLanding' feature to improve etch uniformity by automatically adjusting the etch process endpoint. Its integrated recipe optimization and management model help to maintain a stable, repeatable process. In addition to its advanced features, LAM RESEARCH Rainbow 4000 Series etcher/asher offers improved thermal management with a patented high-efficiency HEDP gas heater. This equipment is also supported by LAM RESEARCH global service network, which provides technical support and installation services worldwide. Rainbow 4000 Series is an excellent solution for advanced etch and asher processes.