Used LAM RESEARCH Rainbow 4000 Series #9169566 for sale
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LAM RESEARCH Rainbow 4000 Series is an etcher/asher designed to meet the exacting demands of modern semiconductor devices. The 4000 Series is a dedicated electrochemical deposition/etching equipment designed specifically for the semiconductor industry. It features a fully-automated, modular design that allows for efficient operation and maximum flexibility in production. The system utilizes multiple etching technologies, including dry etching, reactive ion etching (RIE), plasma etching (PIE), and atmospheric pressure chemical etching (APCE). The unit is specifically designed to deliver precision deposition and etching on semiconductor substrates. Rainbow 4000 Series uses state-of-the-art process control and monitoring capabilities to deliver consistently high-quality etch results. It is capable of handling a wide range of substrates, including silicon, silicon on insulator (SOI), and polysilicon. It is highly configurable, allowing for various etch recipes to meet specific process requirements. It primarily uses RF power for the process, although it is also compatible with microwave and direct current (DC) power sources. LAM RESEARCH Rainbow 4000 Series is capable of handling complex etch processes that require both etching and deposition processes. For instance, it can be used to form metal contacts, such as those used for interconnects, on a device's surface. It is also ideal for other general etch applications, including trimming, fine patterning, and cavity formation processes. Rainbow 4000 Series has several safety features designed to protect both personnel and equipment. It uses extensive interlock and protective procedures so that process errors and runaway conditions are immediately recognized and addressed. The machine also features a comprehensive database for process recipes and a remote terminal for remote monitoring and control. The 4000 Series is designed with a number of simplicity and convenience measures. High-speed robotics and programmability allow for rapid setup time, reduced maintenance costs, and higher throughput. The tool also features a unique low-voltage power supply which reduces artifacts commonly associated with etching and deposition processes. Overall, LAM RESEARCH Rainbow 4000 Series is an advanced etcher/asher that fulfills many of the needs for modern semiconductor devices. It provides precise etching and deposition results, is capable of handling a wide range of substrates, and ensures safety through its comprehensive monitoring and protection features. Its intuitive design and user-friendly operation make it an ideal etching solution for the semiconductor industry.
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