Used LAM RESEARCH Rainbow 4000 Series #9169568 for sale

LAM RESEARCH Rainbow 4000 Series is an advanced etcher/asher equipment designed to meet the needs of the most complex wafer processing applications. This system features a modular platform designed to adapt to any application while providing consistent performance. The unique architecture of the unit allows for up to three additional modules to be easily added for further expandability and versatility. Rainbow 4000 Series is equipped with a Crystal Front Target Assembly (CFTA) that provides thermally-coupled etching and ashing capabilities with precise control over both temperature and pressure. Additionally, this machine is designed for reliable medium to high volume production runs, with advanced motion control ensuring uniformity and repeatability across the entire wafer surface. Equipped with two 1.75 kW RF generators, LAM RESEARCH Rainbow 4000 Series is capable of performing up to 6 wafer cycles per minute for etching, thus increasing throughput. Additionally, the tool utilizes on-board context-sensitive software that adapts to the process parameters and wafer characteristics, ensuring proper integration of the modules and simplified operation. Rainbow 4000 Series enables precise controlling of parameters such as temperature, pressure, RF power, asher time and etching time. The automated parameter control makes this asset ideal for providing uniform wafer uniformity across the entire substrate surface. For easier wafer handling and transport, LAM RESEARCH Rainbow 4000 Series is designed with an integrated wafer transport model. This equipment features a focus chamber, wafer handler, and a receiver chamber that combine to form a flexible wafer handling system. This mechanism can handle a wide range of wafer sizes and shapes, as well as single and double-sided wafers. With an optimized Robotic End Effector, the unit ensures reliable handling and precise wafer positioning. For cleanroom operations, Rainbow 4000 Series is built on a compact, heavy-duty frame with vibration dampening properties. The platform is designed for easy operation through features such as detail-recognition, intuitive touchscreen interface, reliable networking, and machine maintenance functions. To ensure safety during operations, the tool is equipped with a set of safety features that include over-temperature, over-pressure, and electromagnetic interference protection. LAM RESEARCH Rainbow 4000 Series is the ideal tool for etching and ashing applications, allowing for high levels of precision, repeatability, and reliability. With the multitasking capability and modular design, this asset is one of the most advanced etcher/asher systems in the market.