Used LAM RESEARCH Rainbow 4000 Series #9169569 for sale

LAM RESEARCH Rainbow 4000 Series is an etcher/asher that offers a combination of precision plasma etching and clean chemical etching and ashing techniques. This equipment offers a variety of features that make it ideal for several industries, including semiconductor, automotive, telecommunications, consumer electronics, optics, and medical device fabrication. Rainbow 4000 Series' design consists of two separate etch chambers, one for chemical etching and one for plasma etching, that are connected by the same process circuit. This system also features LAM's HFIC (High-Frequency Impedance Control) technology, which allows for precise control of etch rate, wafer-by-wafer modifications, and process capability over a wide range of substrates. LAM RESEARCH Rainbow 4000 Series is designed to provide high throughput and production yields in both chemical and plasma etching. The unit's advanced, computer-controlled programmable process parameters allow for fine-tuning and reproducibility over multiple etching batches. Its advanced Flexi-Etch auto-tuning technology further enhances process control, allowing etch rate and uniformity optimization over a wide range of substrates. For chemical etching, Rainbow 4000 Series includes a Swing Arm Transfer Machine that enables easy part loading and a chemical etch chamber with LAM's Superior RF Bal ECR (radio frequency balanced etch control) technology, which allows for precise control of power, pressure, process chemistry, cooling, and temperature uniformity of the plasma etch process. Additionally, the tool is designed with PFPE (Perfluoropolyether-based)Chemical etch chemistry, an eco-friendly option that eliminates the need for hazardous chemicals. LAM RESEARCH Rainbow 4000 Series' plasma etch chamber provides high etch uniformity and consistent wafer-to-wafer through-put. This asset features an advanced edge Etch Control Model and a coil-less RF power delivery equipment to ensure uniformity and temperature uniformity. The plasma etch chamber also includes a built-in cascade cooling system that helps ensure repeatable etch rates and higher yields. For improved safety and control, Rainbow 4000 Series includes an advanced, password protected access unit. It also includes an integrated process monitoring center, an ESD (ElectroStatic Discharge) monitor, and a powerful multi-terminal user interface. The machine is fully integrated with the latest software updates and its enclosed design reduces noise levels. LAM RESEARCH Rainbow 4000 Series is a powerful etcher/asher tool integrated with advanced features designed for optimal performance and production yields. Its two etch chambers, precise control of process parameters, and process monitoring capabilities make it the perfect solution for industries that require both chemical and plasma etching processes.