Used LAM RESEARCH Rainbow 4400 #293595657 for sale
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LAM RESEARCH Rainbow 4400 is an advanced etcher/asher designed with superior process capabilities for a wide range of materials; from glass, to GaAs. It features an easily accessible load/unload access bay and an insulated vacuum chamber for low temperature operation. The chamber supports two integrated, separately configurable high-power multi-frequency source and three reactive source panels, allowing for low temperature crafting of a wide range of materials; from thick film to silicon wafers. The equipment's integrated gas delivery system and range of advanced process control features allow for precise control of all etching and ashing process parameters. Rainbow 4400 utilizes a powerful database server to manage all process recipes, thereby ensuring the highest level of repeatability and reproducibility, as well as error and warning prevention. The database server also contains a number of predefined recipe steps, thus limiting the need for user configuration and manual set up of sensitive process parameters. LAM RESEARCH Rainbow 4400 utilizes a number of advanced RF generators, including a bipolar RF generator, an 850 MHz RF generator, a 13.56 MHz RF generator, and a 6.78 MHz RF generator. These generators are capable of delivering frequencies in the range of 20 MHz to 1 GHz, as well as providing pulse modulation, phase control, and biphase techniques, to optimize process performance. The unit also features advanced control capabilities, allowing for precise process control, enabling control of process gases, substrate temperatures, and RF power levels. Rainbow 4400 is designed to quickly adapt to changing process requirements, by offering various levels of automation. An automated substrate loading and unloading module, along with an automated end point detection machine, help to minimize the amount of manual intervention required; ensuring efficient and repeatable production. An ergonomic design ensures proper safety and comfort for the user and provides easy accessibility for maintenance. LAM RESEARCH offers a comprehensive suite of services and support options for LAM RESEARCH Rainbow 4400, including online technical support, comprehensive manuals and product documentation, as well as operator training and ongoing maintenance programs. Operating in cleanroom and manufacturing environments, Rainbow 4400 provides a superior level of process control and reliability, making it the perfect choice for a range of production, research, and development applications.
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