Used LAM RESEARCH Rainbow 4400 #9030525 for sale
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ID: 9030525
Wafer Size: 6"
Poly etcher, 6"
Cassette to cassette single wafer
Classic
Clamped with PN 715‐11629‐006 C lower cap electrode 6" installed
Optical non‐contact
ENI OEM‐650A generator
TCU 2080 chiller.
LAM RESEARCH Rainbow 4400 is an etching / asher tool designed to meet the needs of the semiconductor wafer fabrication industry. Rainbow 4400 offers a wide range of features designed to deliver precise and reliable etching processes. The tool offers varying etching rates to accommodate the entire range of process requirements. The tool can be used to etch dielectrics, metals, polymers, and oxides with precision. LAM RESEARCH Rainbow 4400 utilizes a dual showerhead design, allowing for increased process flexibility. The dual showerhead design features low pressure and high pressure capability, allowing for higher etching rates and improved edge control. The etcher also offers a multi-pulse etch feature which allows for pulse modulation of the etch processes and enables lower process temperatures for improved product quality. Rainbow 4400 is equipped with an onboard particle counter that provides real-time monitoring of etching processes and their results. The particle counter is integrated into the feedback control loop, ensuring the highest process uniformity is achieved. In addition, the tool offers a display interface for visual results and can be operated remotely for enhanced accessibility. LAM RESEARCH Rainbow 4400 has also been designed with safety in mind. The tool offers a fully integrated safety system that includes environmental, process, and software safety features. The tool has been designed to meet or exceed the latest safety requirements and has been certified to UL and CE standards. This allows operators to safely utilize the tool's processes with confidence. Rainbow 4400 is an etcher / asher designed to provide process capabilities that are precise and reliable. The tool offers high etching rates, improved edge control, multi-pulse etching, integrated particle counter, and real-time monitoring. The tool also offers a fully integrated safety system, certifications to UL and CE standards, and a remote operation capability. LAM RESEARCH Rainbow 4400 offers a versatile etching solution for today's semiconductor wafer fabrication industry.
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