Used LAM RESEARCH Rainbow 4400 #9226087 for sale
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LAM RESEARCH Rainbow 4400 is a high-performance etcher/asher designed for advanced IC fabrication and packaging applications. Rainbow 4400 offers a wide variety of process capabilities, with the ability to etch and asher materials including silicon dioxide, silicon nitride, polyimides, polysilicates, polyamines, and more. It combines a high-throughput, high-temperature platform with a low-kV gallium ion beam for precise anisotropic etching. LAM RESEARCH Rainbow 4400 is comprised of a loadlock, a process chamber, a load station, and a mainframe. The loadlock allows for loading and unloading of substrates into the process chamber without having to depressurize the chamber. The process chamber is evacuated by a turbo-molecular pump, allowing for higher throughput and faster cycle times. The load station holds the substrates and has a set of elevators used to adjust the substrate height while the etching is being performed. The mainframe houses the power supplies, radio-frequency (RF) generators, and vacuum equipment used to create and maintain the process environment. Rainbow 4400 is a versatile system that can be configured to perform etching, ashing, or both in a wide range of process recipes. It can also be used to perform high-aspect ratio etching and depth profiling of substrates. The unit can accommodate up to 8-inch diameter substrates and can be used for both 2D and 3D etching applications. It is also able to reach temperatures of up to 800°C and can be used for metal layer etching. LAM RESEARCH Rainbow 4400 is equipped with an advanced user interface that allows for easy setup and recipe parameter optimization. It also features real-time display of all machine parameters, including vacuum levels and pump speeds. Its remote diagnostics and maintenance capabilities allow for remote service and support from LAM RESEARCH customer service team. In addition to its advanced etching capabilities, Rainbow 4400 also offers an integrated optical control tool. This asset helps to optimize the etching process by allowing users to monitor the etching profile in real time. This ensures that the etching parameters are adjusted correctly to achieve an ideal result. Overall, LAM RESEARCH Rainbow 4400 is a powerful etcher/asher model with a wide range of capabilities that makes it ideal for advanced IC fabrication and packaging applications. It's high-throughput, high-temperature platform allows for precise anisotropic etching, while its advanced optical control equipment helps to optimize the etching process. Additionally, its easy setup, real-time display of system parameters, remote diagnostics and maintenance solutions, enable and maintain a reliable process result.
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