Used LAM RESEARCH Rainbow 4400 #9402502 for sale

LAM RESEARCH Rainbow 4400
ID: 9402502
Plasma etchers.
LAM RESEARCH Rainbow 4400 etcher / asher is a single-wafer, parallel-plate etcher / asher that is designed to process a variety of substrates, including Silicon, SiGe, and other materials. Rainbow 4400 offers precision delivery of plasma and reactive gases to the wafer with tight control over the concentrations and flows of both the plasma and gas sources. The process equipment allows for cost-effective, advanced etching of structures including MOSFETs, MEMS, and ICs. LAM RESEARCH Rainbow 4400 is equipped with two 8-in Wells for two separate plasma sources and four ports for independent control of reactive gases. It features a power source of up to 5 kW, configurable to accommodate various plasma chemistries. RF and DC are available, with a maximum frequency of 13.56 MHz. Rainbow 4400 can be offered with a vacuum level of 5x10-5 Torr. LAM RESEARCH Rainbow 4400 offers precision control over the plasma, allowing consistent etching / ashing results. It can be fully automated or manually operated, allowing flexibility to suit customers' needs. Additionally, Rainbow 4400 is designed with a patented, low-particulate, high throughput Aerosol Quartz® wafer handling component to ensure repeatable processing. Overall, LAM RESEARCH Rainbow 4400 is a reliable etcher / asher for a variety of materials processing. The results are consistent and repeatable, and the price point is competitive. Its advanced control over etching parameters allows for improved processing of MOSFETs, MEMS, and ICs. Additionally, the Aerosol Quartz wafer handling component reduces the risk of contamination for complex systems.
There are no reviews yet