Used LAM RESEARCH Rainbow 4420 #293595656 for sale

LAM RESEARCH Rainbow 4420
ID: 293595656
Wafer Size: 8"
Etcher, 8".
LAM RESEARCH Rainbow 4420 is a high-end plasma etcher/asher specifically designed for semiconductor processing. It can be used for etching and cleaning a variety of substrates including silicon, quartz and metals. Rainbow 4420 features two nitrogen gas jets, one for etching and one for ashing, as well as adjustable RF and DC controllers which allow technicians to precisely control the amount of etch or ash needed for a particular application. LAM RESEARCH Rainbow 4420 also features a sophisticated gas injection equipment which allows injection of special reactant gases to improve etching uniformities. Rainbow 4420 has independent dual chamber operation which allows simultaneous or separate processing in each chamber. This further improves process uniformity and productivity. LAM RESEARCH Rainbow 4420 also offers a large chamber volume which provides a uniform plasma etch or ash throughout the entire chamber. Further, the pre-heat feature allows the system to be pre-heated prior to processing ensuring uniform processing conditions throughout the unit. Rainbow 4420 is capable of performing both isotropic and anisotropic processes. Isotropic etching features directional etching from both top and bottom sides of the substrate. This improves etch sidewall angle profiles and provides high-aspect ratio etching without impacting critical dimension (CD) control. Anisotropic processes feature directional etching from one side of the substrate which produces highly angled, angled wall profiles along with improved CD control. LAM RESEARCH Rainbow 4420 also features a number of advanced control and monitoring features. Technicians are able to monitor and adjust the etch or ash process in real-time. There is an additional data collection feature which allows users to store and review the parameters of the process over a period of time. This data can then be used to optimize the process and reduce variability. In short, Rainbow 4420 is a sophisticated and highly precise plasma etcher/asher machine which can be used to etch a variety of materials including silicon, quartz and metals. LAM RESEARCH Rainbow 4420 is equipped with a number of cutting-edge features to ensure that each process runs smoothly and efficiently. It also offers advanced control and monitoring features to ensure accuracy and consistency in each batch.
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