Used LAM RESEARCH Rainbow 4420 #293609830 for sale

Name: LAM RESEARCH Rainbow 4420
Brand: LAM RESEARCH
SKU: 293609830
Availability: InStock

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Etchers / Ashers

Manufacturer

LAM RESEARCH

Model

Rainbow 4420

ID: 293609830

Wafer Size: 6"

Etcher, 6" (8) MFC Cassette type: Open cassette, 6"(Standard) LCD Remotte monitor Chamber: Part number / Description 718-092326-061 / ESC 716-028249-064 / Focus ring 716-011540-001 / Face-upper ring electrode, ceramic 715-011531-015 / Upper electrode 716-011570-001 / Orifice filler, ceramic 715-011753-001 / Upper baffle 715-011913-080 / Lower baffle 716-011009-001 / View window 715-011535-001 / Cathode clamp ring 715-011622-201 / Lifter wafer 4 pin new type 715-028532-002 / Ring colling electrostaic 853-540066-005 / Endpoint dection 853-025054-002 / ESC power supply 796-092338-005 / MKS Chamber manometer 797-008571-103 / Unit pressure control 8130 he 50 sccm 853-031764-002 / Lift pin cylinder 796-006238-001 / Throttle valve controller 853-013541-002 / Assy throttle valve RF Generator: ADVANCED ENERGY PDX-1250 RF Generator, part number: 660-024637-003 Assy RF Match gear driven, part number: 853-015130-002 PCB / DIP, part number: 810-017003-004 RF Power cord, 60 feet RF Cable, 65 feet TCU Signal cable,60 feet TCU Channel to interconnect, 60 feet Transfer: GAP calibration tool Transfer calibration tool Part number / Description 853-012123-001 / Robot (ELL and XLL) 853-012601-001 / Load index assy 853-012600-102 / Unload index assy 853-012200-002 / Inner door 853-012200-002 / Outer door 605-017016-100 / Assy stepper PCB Motor drive 853-029462-001 / XLL Wafer sensor VME PCB: Part number / Description 810-017034-005 / Assy PCB VME 68030 810-017031-004 / ASSY PCB ADIO-AO 810-017038-002 / SIO PCB 810-017388-003 / Ethernet address PCB Gases: CL2 500 SCCM SF6 200 SCCM C2F6 200 SCCM HE 500 SCCM HBR 100 SCCM HE 50 SCCM CHF3 20 SCCM O2 10 SCCM Power supply: Part number / Description 660-091820-001 / 660-091820-003 / DC Power supply: +24V 660-091821-001 / 660-091821-003 / DC Power supply: 5V / 12V / 15V / 24V Manuals included.

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LAM RESEARCH Rainbow 4420 is an etcher / asher used primarily for semi-conductor manufacturing and device fabrication. Rainbow 4420 is a fully automated, high-performance dry etcher / asher equipment. It is capable of delivering superior etching and ashing quality with high throughput, making it ideal for advanced device manufacturing. LAM RESEARCH Rainbow 4420 system offers ultra-fast etching and ashing to provide superior results. The unit has a modular design and uses a full-range gas delivery machine, allowing for a variety of process configurations. It features advanced RF power delivery for precise and consistent etching, even for the most challenging of substrates. Rainbow 4420 also offers enhanced etching capability with its advanced process control tools, which provide accurate and repeatable parameters. To ensure maximum reliability and performance, LAM RESEARCH Rainbow 4420 tool utilizes various layers of hardware and software control systems. These include a sophisticated control software, a high-speed data acquisition asset, and an advanced process model. The control equipment provides precise control over etching rates,recipts, recipes, parameters, and even the timing of processes. The data acquisition system then provides real-time monitoring of etch rate and process variation. Furthermore, Rainbow 4420 unit offers a range of advanced process controls and optimization tools, such as the multi-step etch sequencing and cross-wafer synchronization. It is also capable of supporting a broad range of materials, including silicon, SiO₂, and III-V compounds, as well as a variety of different layers and substrates. This makes it suitable for a wide range of different types of devices. Finally, LAM RESEARCH Rainbow 4420 machine is designed to offer an easy and economical way to achieve production-level etching and ashing performance, in both a single and multi-station configuration. The tool is fully configurable, allowing for seamless integration into existing production processes. With its superior etch quality and high throughput, it is the perfect choice for advanced device manufacturing.