Used LAM RESEARCH Rainbow 4420 #9176776 for sale

LAM RESEARCH Rainbow 4420 etcher/asher is a highly advanced, fully automated etching and ashing equipment designed for fast, high-precision production of integrated circuit (IC) microstructures. The system is designed to streamline the process of etching and ashing complex micro-features with outstanding material removal rate (MRR), surface roughness (Ra) and threshold voltage (Vth) control accuracy. Rainbow 4420 is equipped with a 4-axis SCARA robot for maximum overall process effectiveness and to address a wide range of application requirements. The unit also features a high-precision motion-control machine that manages the robotic function, enabling excellent etch and ash uniformity. Additionally, the tool is equipped with LAM RESEARCH Automated Intelligent Process Control (IPC) software that provides high-performance, automated process control and continuous monitoring to ensure product quality. LAM RESEARCH Rainbow 4420 is built with advanced etch and ash control capabilities such as pressure, velocity, temperature, and process gas manipulation capabilities for improved process control. This includes the ability to control high-temperature process gas temperatures (over 550°C) and high etch rates (>5,000 Å/min) for ultra-deep micron-level feature definitions. Its full-wafer process zone can etch or ash up to a 12-inch pocket diameter and supports up to eight etch pockets in a single module. In addition to its advanced capabilities, Rainbow 4420 asset is cost effective and easy to maintain. Its integrated wet-cleaning model conserves chemical usage, reducing waste and increasing productivity. The intuitive LCD touch-screen interface simplifies user interaction and provides easy access to chemical maintenance and error messages, meaning users are informed and active in the maintenance of their machine. LAM RESEARCH Rainbow 4420 etcher/asher is the ideal equipment for IC process engineers looking to maximize etch and ash performance while minimizing chemical and tool maintenance costs. With its advanced process control and high precision etch and ash uniformity, Rainbow 4420 is a must-have system for any chip-scale production environment.